The Charles Stark Draper Laboratory, Inc.

Mks Instruments, Inc.

Varian Semiconductor Equipment Associates, Inc.

Michael Kishinevsky

Ali Shajii

William M Holber

Stephen P Smith

Paul A Ward

Siddharth P Nagarkatti

Daniel Goodman

John A Smith

Farhad Zarinetchi

Ilya Bystryak

Steve Finberg

Timothy E Kalvaitis

William S McKinney, Jr

Matthew Soucy

Andrew Cowe

Alan Millner

Gregory E Stratoti

A non-contiguous group of cells in a battery of cells is selected for charging or discharging the battery.

High-efficiency battery equalization for charging and discharging

A plasma flood gun for an ion implantation system includes an insulating block portion and first and second conductive block portions disposed on opposite sides of the insulating block portion. Conductive straps can be coupled between the first and second conductive block portions. The conductive block portions and the central body portion include recesses which form a closed loop plasma chamber. A power source is coupled to the conductive block portions for inductively coupling radio frequency electrical power into the closed loop plasma chamber to excite the gaseous substance to generate a plasma. The respective recess in the second conductive block portion includes a pinch region having a cross-sectional dimension that is smaller than a cross-sectional area of portion of the closed loop plasma chamber directly adjacent the pinch region. The pinch region can be positioned immediately adjacent an outlet portion formed in the second conductive block portion.

Pinched plasma bridge flood gun for substrate charge neutralization

A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

Radio frequency power delivery system

Determining linear modulator dynamics in an interferometric fiber-optic gyroscope may be accomplished by applying a stimulus at a point within the gyroscope, observing a response in an output of the gyroscope, and determining, from the observed response, the linear modulator dynamics.

Determining and compensating for modulator dynamics in interferometric fiber-optic gyroscopes

A method and apparatus for controlling a power supply to prevent instabilities due to dynamic loads in RF plasma processing systems, operating at frequencies of from 1 MHz and up 1 MHz and above. The apparatus includes a power source, a power converter receiving power from the source, the power converter providing a constant output power controlled by varying at least one of input voltage or switching frequency, and an RF generator receiving constant power from the power converter.

Method and apparatus for preventing instabilities in radio-frequency plasma processing

A method and apparatus for controlling a power supply to prevent instabilities due to dynamic loads in RF plasma processing systems, operating at frequencies of from 1 MHz and up, uses a feedforward type of control loop to tightly regulate the power supplied to the dynamic electrical load, such as loads caused by variable and inconsistent plasma impedance. A feedback control loop can also be used in combination with the feedforward loop, but at a slower rate, to help regulate the amount of power provided to the load.

Growing community of inventors

North Andover, MA, United States of America

Michael Kishinevsky