Leybold Systems Gmbh

Michael K&ouml;nig

Harro Hagedorn

Hans-Georg Lotz

Hermann Kloberdanz

G&uuml;nter Br&auml;uer

Alfons Z&ouml;ller

J&uuml;rgen Meinel

Jochen Schneider

G&ouml;tz Teschner

In an apparatus for the coating of substrates in a vacuum with rotatable substrate carriers (,) and with a loading and an unloading station (,or,), two vacuum chambers (,) are provided with several coating stations (,or,to,), directly next to one another, wherein a rotatable transport arm (,or,) is accommodated in each of the two chambers (,), and the transport planes of the two transport arms (,) are aligned with one another. In the separation area of the two chambers (,), an air lock is provided with a corresponding transfer apparatus (,) with two transport arms (,), whose rotary plate (,) is provided with substrate storage unit (,) and projects about halfway into one chamber (,) and halfway into the other chamber (,), wherein one chamber (,) has both the loading as well as the unloading station (,or,).

Apparatus for the coating of substrates in a vacuum chamber

A device for coating a disk-like substrate (,) with the aid of cathodic sputtering, having an essentially cylindrical transport chamber (,) and with a vacuum pump (,) connected to the transport chamber (,) and with an opening (,) that can be closed off by a plate (,) for inserting and removing the substrates (,) and with a coating chamber (,) containing the cathode (,) and with a substrate carrier (,) seated so as to be able to rotate in the transport chamber (,), the substrate carrier (,) is connected to the output shaft (,) of a motor-gear assembly unit (,) and, on the one hand, can be displaced by the latter inside the transport space (,) from a center operating position (A) in a vertical lifting motion into an upper coating position (B) and a lower rest position (C) and, on the other, can be rotated by the output shaft (,) inside the transport space (,), wherein the suction connector (,) of the vacuum pump (,) on the bottom part (,) of the transport space (,) can closed off by the substrate carrier (,) in the rest position (C).

Sputtering device for coating an essentially flat disk-shaped substrate

Growing community of inventors

Frankfurt-am-Main, Germany

Michael König

Growing community of inventors

Frankfurt-am-Main, Germany

Michael K&ouml;nig

Michael König