Lockheed Martin Corporation

Michael K McNulty

Joseph W Hahn

John Ditri

Daniel W Harris

Bradley David Dufour

A heat sink for cooling an integrated circuit device includes a body having a first side and a second side. A fluid inlet opening is formed in the second side of the body for receiving pressurized fluid from a fluid source. A plurality of impingement openings are formed in the first side of the body. At least one fluid delivery channel is provided and configured to deliver pressurized fluid from the fluid inlet opening to the plurality of impingement openings for generating a plurality of fluid streams expelled from the plurality of impingement openings. A plurality of fluid diverters are formed on the first side of the body and arranged generally between each of the plurality of impingement openings for diverting a flow of fluid around each of the plurality of impingement openings.

Micro jet impingement heat sink

An electronic chip package includes a base defining a fluid inlet opening for receiving pressurized fluid from a fluid source and a fluid outlet opening. A dielectric body is arranged on the base and configured to support an electronic device. The dielectric body comprises a coolant flow chamber formed in a first surface thereof, and a plurality of impingement openings formed within the coolant flow chamber. The plurality of impingement openings are in communication with the fluid inlet opening of the base for generating a plurality of fluid streams to be expelled into the coolant flow chamber. The body further comprises a coolant return port formed within the coolant flow chamber and in communication with the fluid outlet opening of the base.

Integration of chip level micro-fluidic cooling in chip packages for heat flux removal

An electronic chip package including a base defining a fluid inlet opening for receiving pressurized fluid from a fluid source and a fluid outlet opening. A dielectric body is arranged on the base and configured to support an electronic device. The dielectric body comprises a coolant flow chamber formed in a first surface thereof, and a plurality of impingement openings formed within the coolant flow chamber. The plurality of impingement openings are in communication with the fluid inlet opening of the base for generating a plurality of fluid streams to be expelled into the coolant flow chamber. The body further comprises a coolant return port formed within the coolant flow chamber and in communication with the fluid outlet opening of the base.

A hermetically sealed housing for plural GaAs chips includes a body made from Al/SiC. The body defines a peripheral seal ring support surface, an electrical connector insert support surface and an end wall to which a ceramic insert is mounted. The insert includes a first portion with an upper surface within the sealed housing, Which upper surface is coplanar with the upper surface of the body, for convenient HDI film connections to the chips and electrical connector inserts. The refractory electrical conductors extend from the upper surface of the first portion of the insert to an exterior terminal portion of the insert. The terminal portion of the insert is spaced from the first portion of the insert by a non-terminal portion containing no terminals. The non-terminal portion of the insert is coplanar with the seal ring support surface of the body, and contiguous therewith. The insert, a titanium seal ring, and the body are hermetically joined by aluminum, which fills the pores of the body and the interstices between the body, the insert, and the seal ring. A domed lid is sealed to the seal ring.

Growing community of inventors

Cherry Hill, NJ, United States of America

Michael K McNulty