Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Michael Jungh{overscore (a)}hnel

Klaus Goedicke

Torsten Winkler

Henry G&uuml;ldner

Henrik Wolf

Karsten Handt

Frank Eckholz

Process and control arrangement for introducing pulsing energy introduction into magnetron discharges. The process includes feeding a charge to the electrodes of a magnetron arrangement via a ignition source at a time t , and, after the feeding of the electric charge, determining an ignition of the magnetron discharge. The process also includes introducing a current, having a predetermined value, from a boost source at a time t , and, at a time t , separating the ignition source from the electrodes of the magnetron arrangement. The introduction of the current by the boost source continues for a certain duration t . The process also includes interrupting the introduction of the electric energy for a predetermined time t .

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Dresden, Germany

Michael Jungh{overscore (a)}hnel