Other

Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Michael Jungh&auml;hnel

Klaus Goedicke

Torsten Winkler

Volker Kirchhoff

Fred Fietzke

Jonathan Reschke

Hans Buchberger

Manfred M&uuml;ller

Arno Hebgen

Ralf Bl&uuml;thner

Hans-Hermann Schneider

Production of a thin-film system containing at least one ultra-thin film, preferentially in the film thickness range from 1 to 10 nm, which is deposited by plasma-aided chemical or physical vapor-phase deposition using magnetron discharges. The method is characterized in that in the course of deposition of the ultra-thin film the power output is introduced into the plasma in the form of a controlled number of power pulses and that the average power output during the pulse-on time is set higher by a factor of at least 3 than the averaged power output over the entire coating time during deposition of the ultra-thin film.

Method of producing a thin-film system

Magnetron discharges are pulse-operated to avoid the so-called &ldquo;arcing&rdquo;. In the case of magnetron discharges from alternating current-fed magnetrons, the process is limited to the minor power of the energy supply because of the load-carrying capacity of the required electric components. When the magnetron discharges are fed by direct current, their effectiveness deteriorates because of the deposition of layers on the anode surfaces. The new process should enable a high supply power and prevent arcing. In magnetron discharges with at least two magnetron electrodes, the energy is supplied in such a way that at least one magnetron electrode is a cathode or anode and a number n of direct current pulses of said polarity is supplied. The poles of at least one magnetron electrode are then reversed and a number n of direct currents of this polarity are supplied. The process is carried on in this manner, the frequency of the direct current pulses being higher than that of the polarity reversals. The energy supply effectiveness is thus improved. This process and system enable the production of layers having the most different properties, for example for the glass, packaging, electronic, and machine construction industries.

Process and system for operating magnetron discharges

Growing community of inventors

Dresden, Germany

Michael Junghähnel

Growing community of inventors

Dresden, Germany

Michael Jungh&auml;hnel

Michael Junghähnel