Koninklijke Philips Corporation N.v.

Michael Josepha Mathijs Renkens

Petrus Carolus Maria Frissen

George Arie Jan De Fockert

Rob Jacobus Matheus Coolen

Jan Van Eijk

Johan Cornelis Compter

Theo Anjes Maria Ruijl

Johan Cornelia Compter

Ronatus Gerardus Klaver

The invention relates to a system () for detecting motion of a body () comprising a first elongated grating strip () coupled to said body and a separate and substantially stationary second elongated grating strip () crossing said first elongated grating strip. The system further comprises optical detection means () arranged to receive one or more light beams diffracted at said first and second elongated grating strips to detect motion of said body. The invention further relates to a method for detecting motion of a body () and to a body processing or inspection system.

System for detecting motion of a body

Positioning device having a first part () which is movable relative to a second part () in a X and Y-direction, said first part () comprising a carrier () on which a system of magnets () is arranged in a pattern of rows () and columns () parallel to the X- and Y-direction, respectively. The magnets in each row and column are arranged in a Halbach array, i.e. the magnetic orientation of each successive magnet in each row () and each column () is rotated through 90&#xb0; counter-clockwise. The second part () comprises an electric coil system () with two types of electric coils (C, C), one type having an angular offset of +45&#xb0; and the other type having an offset of &#x2212;45&#xb0; with respect to the X-direction. The magnet configuration causes a very strong magnetic field. The positioning device comprises a number of magnetically sensitive sensors (Hall sensors) giving a signal which depends on the local mutual positions of the permanent magnets of the first part relative to the electric coils of the second part in an area in which the parts overlap.

Displacement device

Positioning device having a first part ( ) which is movable relative to a second part ( ) in a X and Y-direction, said first part ( ) having a carrier ( ) on which a system of magnets ( ) is arranged in a pattern of rows ( ) and columns ( ) parallel to the X- and Y-direction, respectively. The magnets in each row and column are arranged in a Halbach array, i.e. the magnetic orientation of each successive magnet in each row ( ) and each column ( ) is rotated through 90&deg; counter-clockwise. The second part ( ) has an electric coil system ( ) with two types of electric coils (C , C ), one type having an angular offset of &plus;45&deg; and the other type having an offset of &minus;45&deg; with respect to the X-direction. The magnet configuration causes a very strong magnetic field. The positioning device has a number of magnetically sensitive sensors (Hall sensors ) giving a signal which depends on the local mutual positions of the permanent magnets of the first part relative to the electric coils of the second part in an area in which the parts overlap.

Growing community of inventors

Eindhoven, Netherlands

Michael Josepha Mathijs Renkens