Advanced Technology Materials, Inc.

Entegris, Inc.

Cooll Sustainable Energy Solutions B.v.

Michael J Wodjenski

Jose I Arno

J Donald Carruthers

James A Dietz

Dennis F Brestovansky

James V McManus

W Karl Olander

Luping Wang

Matthew B Donatucci

Robert E Kaim

Frank DiMeo, Jr

Steven M Lurcott

Steven E Bishop

Thomas H Baum

Chongying Xu

Bryan Clark Hendrix

Joseph D Sweeney

John N Gregg

Scott L Battle

Joseph Robert Despres

John M Cleary

Anthony M Avila

Philip A Moroco

Phillip A Moroco

Judith A Moroco, Legal Representative

Edward A Sturm

Mackenzie E King

Donn Naito

Edward Edmiston Jones

Lawrence H Dubois

Shaun M Wilson

Joshua B Sweeney

Brian Bobita

James V Mcmanus

Karl W Olander

Frank Dimeo

Joseph Marzullo

Donald J Carruthers

Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.

Solid precursor-based delivery of fluid utilizing controlled solids morphology

A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

Rectangular parallelepiped fluid storage and dispensing vessel

Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluid-utilizing apparatus such as ion implanters.

Endpoint determination for capillary-assisted flow control

A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.

Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel

A durable carbon pyrolyzate adsorbent having reversible sorptive affinity for hydrogen sulfide, and including the following characteristics: (a) a bulk density as measured by ASTM D2854 in a range of from 0.55 g/cc adsorbent to 1.25 g/cc adsorbent; (b) an HS capacity in a range of from 140 cc HS/g adsorbent to 250 cc HS/g adsorbent, at normal conditions (1 atm, 293.15&#xb0; K); (c) an HS capacity in a range of from 1.0 cc HS/g adsorbent to 15.0 cc HS/g adsorbent, at partial pressure of 0.76 torr (101.3 Pa) (1000 ppm) of HS at 293.15&#xb0; K; and (d) a single pellet radial crush strength in a range of from 7 kilopond (kP) to 40 kilopond (kP) as measured by ASTM D4179. Such adsorbent is usefully employed for capture of hydrogen sulfide from gases containing same, such as HS-containing gas associated with flowable hydrocarbonaceous material in refining operations, biogas produced by biomass digesters, gas mixtures produced by fluid catalytic cracking (FCC) units, and effluents from power plants gasifying sulfur-containing coal in an integrated gasification combined cycle (IGCC) process.

Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent

Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.

A monitoring system () for monitoring fluid in a fluid supply vessel () during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors () for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module () operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor () and display () operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.

Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source vessel containing the gas at superatmospheric pressure. The pressure-regulated gas source vessel can be arranged with a pressure regulator at or within the vessel and a flow control valve coupled in flow relationship to the vessel, so that gas dispensed from the vessel flows through the regulator prior to flow through the flow control valve, and into the gas manifold. The apparatus and method permit an enhancement of the safety of storage and dispensing of toxic or otherwise hazardous gases used in semiconductor processes.

Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases

A gas cabinet including an enclosure containing at least one gas supply vessel and flow circuitry coupled to the gas supply vessel(s). The flow circuitry is constructed and arranged to flow dispensed gas from an on-stream gas supply vessel to multiple sticks of the flow circuitry, with each of the multiple sticks being joined in gas flow communication to a respective gas-utilizing process unit. The flow circuitry is valved to enable sections of the flow circuitry associated with respective ones of the multiple sticks to be isolated from other sections of the flow circuitry, so that process gas can be flowed to one or more of the sticks, while other sticks are being evacuated and purged, or otherwise are closed to dispensed gas flow therethrough.

Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications

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New Milford, CT, United States of America

Michael J Wodjenski