Exogenesis Corporation

Michael J Walsh

Sean R Kirkpatrick

Allen R Kirkpatrick

Richard C Svrluga

Joseph B Khoury

Kiet A Chau

James G Bachand

Thy Yam

A method for removing amorphous regions from a surface of a crystal substrate uses an accelerated neutral beam including reactive gas species for removing or reactively modifying material surfaces without sputtering. Accelerated neutral atom beam enabled surface reactions remove surface contaminants from substrate surfaces to create an interface region with exposed crystal lattice in preparation for next phase processing.

Method and apparatus for forming substrate surfaces with exposed crystal lattice using accelerated neutral atom beam

A device such as a medical device and a method for making same provides a surface modified by beam irradiation, such as a gas cluster ion beams or a neutral beam, to inhibit or delay attachment or activation or clotting of platelets.

Treatment method for inhibiting platelet attachment and articles treated thereby

A method for Neutral Beam irradiation derived from gas cluster ion beams and articles produced thereby including optical elements.

Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

A method for treating a silicon substrate, and a silicon substrate, provide a surface treated with an accelerated neutral beam.

A method of treating a surface of a silicon substrate forms an accelerated gas cluster ion beam of carbon atoms, promotes fragmentation and/or dissociation of gas cluster ions in the beam, removes charged particles from the beam to form a neutral beam, and treats a portion of a surface of the silicon substrate by irradiating it with the neutral beam. A silicon substrate surface layer of SiC(0.05&#x3c;X&#x3c;3) formed by accelerated and focused Neutral Beam irradiation of a silicon substrate wherein the Neutral Beam is derived from a gas cluster ion beam which has had its cluster ions dissociated and charged particles removed.

Method and apparatus for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

A method of improving the surface of an object treats the surface with a neutral beam formed from a gas cluster ion mean to create a surface texture and/or increase surface area.

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Middleton, MA, United States of America

Michael J Walsh