Redwood Microsystems, Inc.

Smc Kabushiki Kaisha

Michael J Selser

James M Harris

Albert Karl Henning

Bradford A Cozad

Babak A Taheri

Errol B Arkilic

Walter A Weber

Integrated micro-valve is formed to control fluid flow and pressure. The valve converts supplied energy to mechanical energy through a means for energy conversion resident above a flexible wall or membrane. In one embodiment a sealed cavity contains a fluid that expands and contracts as it is heated or cooled, thus causing the flexible wall to move. Movement of this wall or membrane is used to move a valve element and dynamically control the opening or closing of a valve port over a predetermined range. Additional means for stiffening are added to the membrane to improve performance.

Dual pedestal shut-off valve

A method for achieving high flow in valves with small actuation distance is described. A detailed description for a silicon microvalve is provided. An algorithm is described for designing optimized valves.

High-flow microvalve

A method of attaching a micromechanical fluid control device to a substrate includes the steps of forming a first ring of a first adhesive around an aperture defined between a micromechanical fluid control device and a substrate. The first adhesive forms a first interface between the micromechanical fluid control device and the substrate that is clean and corrosion resistant. A second ring of a second adhesive is applied around the first ring. The second adhesive forms a second interface between the micromechanical fluid control device and the substrate that is hermetic.

Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby

An apparatus for mounting micromechanical fluid control components includes a manifold interface plate adaptable for connection to a manifold substrate oriented in a horizontal plane. The manifold interface plate receives mounting stress forces from the manifold substrate along the horizontal plane. An orthogonal component plate is connected to the manifold interface plate in a vertical plane with respect to the horizontal plane of the manifold substrate. The orthogonal component plate includes an orthogonal mounting surface with a micromechanical fluid control component mounted on it. The position of the micromechanical fluid control component on the orthogonal mounting surface substantially isolates the micromechanical fluid control component from the mounting stress forces.

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Livermore, CA, United States of America

Michael J Selser