Thermo Electron Corporation

Michael Hugh Humpherson

Bryan Robert Barnard

Alan Rupert Bayly

A flood gunfor charge neutralization of an analysis region Rof a sample S downstream of the flood gun, comprising: a first sourceof electrons; a second sourceof positively charged particles; and an extraction and focusing assemblyarranged to: (i) extract a first, electron beam from the first source and focus the first beam to a first flood area Aat the analysis region; and (ii) extract a second, positive particle beam from the second source and focus the second beam to a second flood area Aat the analysis region. The electron beam and the positive particle beam may both be extracted and focused simultaneously, in a single mode of operation or, alternately, in a dual mode of operation. A corresponding method of providing charge neutralization and a spectroscopic system for secondary particle emission analysis are disclosed.

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Surrey, United Kingdom

Michael Hugh Humpherson