Dr. Johannes Heidenhain Gmbh

Johannes Heidenhain Gmbh

Dr. Johnannes Heidenhein Gmbh

Michael Hermann

Wolfgang Holzapfel

Walter Huber

Karsten Saendig

Karsten Sändig

Sebastian Tondorf

Alfred Affa

Ulrich Benner

Ralph Joerger

Volker Hoefer

Birgit Lange

Markus Kühler

Johannes Trautner

Volker Höfer

Herbert Pronold

Volker H&ouml;fer

Völker Hofer

Alexander Gruber

Juergen Schoser

Michael Kugler

Gerhard Bock

Jürgen Schoser

Volker HÖFER

An optical position-measuring device for determining the relative position of two objects includes two scanning units which are connected to one of the objects and each include a light source, one or more gratings and a detector assembly. A scale is connected to the other object and has two tracks each containing incremental graduations extending along a first one of the measurement directions. The incremental graduations each are composed of graduation regions which have different optical properties and are periodically arranged along an incremental graduation direction. The two incremental graduation directions form an angle of between 0&#xb0; and 90&#xb0; relative to each other. Each of the two incremental graduations has a reference mark integrated therein such that scanning of the reference mark allows a reference signal to be generated at a defined reference position along each of the measurement directions. The reference marks include both aperiodic and periodic portions.

Optical position-measuring device comprising two tracks each containing incremental graduations with integrated reference marks having aperiodic and periodic portions

An optical position measuring instrument including a scale and a scanning unit, wherein the scanning unit and the scale are movable with respect to one another. The scanning unit includes a detector unit, and a reflector unit that has a first and second wave front correctors and a beam direction inverter. The reflector unit is disposed so that beams first pass through the scale and the first wave front corrector, then a back-reflection of partial beams is effected in a direction of the scale, and the partial beams then pass through the scale and the second wave front corrector before the partial beams then arrive at the detector unit, wherein it is ensured that wave front deformations of the partial beams are converted into wave front deformations that compensate for resultant wave front deformations of the partial beams upon a second diffraction at the scale.

Optical position measuring instrument

A position-measuring device includes a scale and a scanning unit movable relative thereto. The scale has a measuring graduation, a reference mark and area markings located on a first and on a second side of the reference mark which are configured to exert different deflection effects on a scanning beam incident thereon. An area signal detector is configured to detect, during optical scanning of the area markings, a fringe pattern in a detection plane of the area signal detector. A periodic screen grating is disposed between the scale and the area signal detector and is configured to produce the fringe pattern in the detection plane of the area signal detector such that at least two distinguishable scanning signals are generatable from the fringe pattern as a function of a position of the scanning unit relative to the reference mark.

Position-measuring device

A position-measuring device includes a cylindrical object rotatable about a longitudinal axis and having a circumferential annular reflection measuring graduation. A stationary scanning unit is disposed opposite the cylindrical object and has a light source, a transmission grating and a detector. The scanning unit is configured to optically scan the reflection measuring graduation by beams of light emitted from the light source passing through the transmission grating and then striking the reflection measuring graduation, from where the beams of light are reflected back toward the detector, which is configured to generate rotation-dependent position signals. An optically effective perpendicular distance between the detector and the reflection measuring graduation is selected to be one of greater or less than an optically effective perpendicular distance between the transmission grating and the reflection measuring graduation depending on a radius of the cylindrical object.

A device for interferential distance measurement that includes a light source that emits a light beam along a propagation direction and a scanning plate including a splitter that splits the light beam into a measurement beam and a reference beam. The device further including a reflector disposed spaced-apart in a direction of the propagation direction and a detector element. The measurement beam and the reference beam are propagated from the splitter along different optical paths toward the reflector, where a back reflection of the measurement beam and the reference beam occurs at the reflector toward the scanning plate. In addition, at a combining location the measurement beam and the reference beam attain interfering superposition, and wherein the measurement beam and the reference beam interfering at the combining location are detected by the detector element so that the detector element generates a distance signal regarding a distance between the scanning plate and the reflector.

Device for interferential distance measurement

An optical position-measuring device for detecting the relative position of two objects includes a measuring standard connected to one object, and a scanning unit connected to the other object and including a light source, one or more grating(s), and a detector system. The detector system includes a plurality of detector element groups arranged in a detection plane, via which a plurality of position-dependent, phase-shifted scanning signals is able to be generated by scanning a periodic fringe pattern that results in the detection plane, the detector elements that have in-phase scanning signals forming a group in each case. The sum of the areas and the centroid of the detector elements of a group is identical to the sum of the areas and the centroid, respectively, of the detector elements of each other group. Periodic diaphragm structures are arranged in front of the light-sensitive areas of the detector elements.

Optical position-measuring device

An optical position-measuring device includes a measuring standard and a scanning unit. The measuring standard includes an incremental graduation and at least one reference marking at a reference position. The reference marking has two reference-marking subfields disposed in mirror symmetry relative to a reference-marking axis of symmetry, each of the subfields including a grating structure having a locally changeable graduation period. The scanning unit includes a divergently emitting light source, one or more gratings, and a reference-signal detector system. The reference-signal detector system has at least four detector arrays formed and positioned such that, from the scanning of the reference marking via the reference-signal detector system, first and second pairs of partial reference signals result, in each case having a signal pattern in phase opposition. The first pair of partial reference signals is offset by an offset amount relative to the second pair of partial reference signals.

An optical position-measuring device includes a scanning bar extending in a first or second direction, and a scale extending in the other direction. The scale is offset by a scanning distance from the scanning bar in a third direction perpendicular to the first and second directions. The device has a light source whose light penetrates the scanning bar at an intersection point of the scanning bar and scale to fall on the scale and arrive back at the scanning bar. At a detector, the light is split by diffraction into different partial beams at optically effective structures of the scanning bar and scale and combined again. A periodic signal is obtained in the detector in response to: a shift between the scanning bar and scale in the first direction due to interference of combined partial beams, and a change in the scanning distance between the scanning bar and scale.

Optical position-measuring device having two crossed scales

An optical position-measuring device for detecting the position of two objects movable relative to each other in at least one measuring direction includes a measuring standard which is joined to one of the two objects and possesses an incremental graduation extending in the measuring direction, as well as at least one reference marking at a reference position. The reference marking includes two reference-marking subfields disposed in mirror symmetry with respect to a reference-marking axis of symmetry, each of the subfields being made up of a structure extending in the measuring direction and having a locally changeable graduation period. In addition, the position-measuring device has a scanning unit which is joined to the other of the two objects and to which a scanning device is assigned that is used to generate at least one reference signal at the reference position. The scanning device includes at least one light source emitting divergently in the direction of the measuring standard, as well as a detector system having elements which are disposed along the measuring direction such that, starting from a central detector-system axis of symmetry in the measuring direction, the center-to-center distances between adjacent elements in the same direction change like the graduation periods of the structures in the reference-marking subfields starting from the reference-marking axis of symmetry.

A measuring device for determining the relative offset between two components in a z-direction includes two measuring members. A first measuring member is affixable on a first component, and the second measuring member is affixable on a second component. Furthermore, the measuring device includes a sensor device for determining the relative position of the two measuring members. The first measuring member and the second measuring member are affixable on the first components at a rigid angle. At least one of the measuring members is able to be brought into adhesive contact with the first component or the second component. The measuring device includes support members for at least one measuring member so that the measuring member is able to assume a parking or an operating position. The measuring members are precisely and reproducibly aligned in space relative to each other in the parking position.

Measuring device for determining the relative offset between two components

A position-measuring device includes a light source, a first grating, a second grating and photodetectors, light from the light source, which is split into partial beams of different directions at the first and second grating, being directed via a deflecting element to the detector. The deflecting element for incident partial beams having different directions has different regions, so that all partial beams directed from the deflecting element to the detector are approximately parallel.

Position-measuring device with movable deflection device and grating and with stationary grating, light source, and detector

An arrangement for generating phase-shifted incremental signals characterizing relative positions of two objects moving with respect to each other along a measuring direction. The measuring arrangement includes a light source emitting bundles of beams, a measurement grating, a plurality of optional gratings and a scanning unit. The scanning unit includes a grating in a scanning plane, wherein the grating includes a plurality of blocks arranged periodically along the measuring direction with a grating periodicity equaling a fringe pattern periodicity, and each block includes n grating sections arranged along the measuring direction, each of the n grating sections having a periodic grating structure, deflecting the bundles of beams propagated through each of the n grating sections in several different spatial directions. The scanning unit further includes a plurality of detector elements arranged downstream of the grating, wherein the detector elements are arranged in the spatial directions in the detector plane, and wherein the detector plane is located where the bundles of beams coming from the grating are spatially separated. The fringe pattern is formed in the scanning plane by the bundles of beams emitted by the light source interacting with the measurement grating and the optional gratings.

Optical position measuring arrangement

A position-measuring device includes a scanning unit and a measuring graduation that is displaceable thereto in at least one measuring direction. The measuring graduation includes two incremental-graduation tracks extending in parallel in the measuring direction, between which a reference-marking track having at least one reference marking at a reference position extends. The scanning unit includes a first scanning device for generating the reference-pulse signal and a second scanning device for generating the incremental signals. To generate the incremental signals, a scanning beam acts at least once upon each incremental graduation in an incremental-signal scanning field.

A position measuring instrument for detecting a relative position, the position measuring instrument including a scale having a measuring graduation extending in a measuring direction and a scanning unit that can be moved in the measuring direction in relation to the scale so as to generate a resultant scanning signal, wherein the scanning unit has a scanning graduation arranged on a side of the scanning unit. Either the measuring graduation or the scanning graduation includes graduation areas located periodically in the measuring direction, the graduation areas extend perpendicular to the measuring direction along an extension direction, and the graduation areas, along the extension direction, have differentiable contour shapes, which are dimensioned such that unwanted harmonic components can be eliminated from the resultant scanning signal by way of them.

A position measuring system having a scale that includes an incremental graduation track, which extends in a measuring direction, the incremental graduation track having a periodic arrangement of graduation areas with different optical properties and a reference marking in a reference position, which has an aperiodic arrangement of graduation areas. A scanning unit including a light source and an opto-electronic detector arrangement having a reference pulse signal detection unit for generating a reference pulse signal. A periodic strip pattern results in a detection plane, which is amplitude-modulated in an area of the reference position, wherein the reference pulse signal detection unit includes several reference pulse signal detection elements, which create the reference pulse signal so that a periodic signal portion, as well as low-frequency signal portions are filtered out of the incremental graduation track to a large degree.

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Tacherting, Germany

Michael Hermann