Von Ardenne Anlagentechnik Gmbh

First Solar, Inc.

Von Ardenne Gmbh

Von Ardenne Asset Gmbh &co. Kg

Michael Hentschel

Hubertus Von Der Waydbrink

Reinhard Jaeger

Ricky Charles Powell

Thomas Meyer

Daniel Stange

Steffen Lessmann

Michael Huhn

Hans-Christian Hecht

Reinhardt Bauer

Andrej Wolf

Marco Kenne

Carsten Deus

Matthias Smolke

Siegfried Scheibe

Christoph Kaiser

Jens Meyer

Damir Muchamedjarow

Steffen Grosser

Steffen Leβmann

Thomas Bock

Uwe Traeber

Christoph Dubau

Markus Berendt

Knut Barthel

Hubertus Von Der Waybrink

Disclosed herein are systems, methods, and devices for transporting substrates. A transport device may include a plurality of rotational bodies, where each rotational body is rotatably attached for transporting a rod-shaped workpiece. The transport device may include a rotational excitation element configured to excite rotation of the workpiece when it is supported on one of the plurality of rotational bodies.

Transport device and method

In various embodiments, a transporting device for transporting a substrate in a process chamber is provided. The transporting device includes a guiding rail arrangement having two guiding rails for mounting a multiplicity of bars between the two guiding rails. The two guiding rails form a closed path of movement along which the multiplicity of bars are guided. The transporting device further includes the multiplicity of bars that are mounted in the guiding rail arrangement, and a drive device for pushing at least one bar of the multiplicity of bars in such a way that, in a transporting region of the guiding rail arrangement, in each case multiple bars of the multiplicity of bars are pushed against one another and the bars that have been pushed against one another move along the path of movement in the transporting region.

Transporting device, processing arrangement and coating method

A substrate treatment plant includes a process chamber delimited by chamber walls and in the process chamber a substrate conveying unit for the horizontal conveyance of slab-shaped substrates in one conveying plane and in one conveying direction. The substrate conveying unit includes an arrangement of rotatably mounted, cylindrical conveying rollers transversely arranged to the conveying direction, the topmost generatrices of the conveying rollers defining the conveying plane, and at least one substrate treatment unit, which is located above the conveying plane, and at least one gas inlet. In the region of the substrate treatment unit at least one additional heating unit is located below the conveying plane and a condensation unit is located under the substrate conveying unit.

Continuous substrate treatment plant and cleaning method

A substrate-treatment installation includes a vacuum chamber, a substrate treatment device within the vacuum chamber, a substrate transport device within the vacuum chamber for guiding a substrate along a longitudinal direction in a substrate transport plane past the substrate treatment device, and a device for controlling substrate temperature. The substrate temperature controlling device includes a heat-absorbing cooler on one side of the substrate transport plane and an insulation member selectively displaceable between at least two different positions to vary extent of thermal shielding of the heat-absorbing cooler relative to the substrate transport plane by the insulation member.

Substrate treatment installation with adjustable thermal insulation for controlling substrate temperature

A surface heating device for a substrate treatment device with increased power density and improved homogeneity of heat radiation includes a jacket tube heater with straight tube sections and bent tube sections in which straight tube sections are arranged parallel to each other in a main plane and straight tube sections are connected to each other by bent tube sections, so that at least part of the bent tube sections are aligned sloped relative to the main plane.

Surface heating device for a substrate treatment device and substrate treatment device

A method and device are provided for cleaning of an optical position measurement system in a coating installation. The optical position measurement system includes a cantilever, and a sensor head having a radiation inlet and/or outlet for the reception and/or emission of an optical signal, at a free end of the cantilever. For tempering of the sensor head, a local thermoregulation is applied using a heater and/or cooling device for heating and/or cooling of the sensor head depending on thermal conductivity of material of at least the sensor head and depending on secondary heat in the coating installation.

Method and device for cleaning an optical position measurement system for substrates in a coating installation

A system and method for coating substrates includes transporting rolls and a collecting container for collecting coating material.

System and method for coating substrates

Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.

Apparatus for continuous coating

The transport device especially for transporting flat substrates through a coating installation comprises a plurality of transporting rolls, which are arranged transversely in relation to the transporting direction, and supporting rolls are also provided.

Transport device, especially for transporting flat substrates through a coating installation

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Dresden, Germany

Michael Hentschel