Jenoptik Gmbh

Jenoptik Technologie Gmbh

Michael Heitmann

Werner Scheler

Klaus Schultz

Berndt Lahne

Axel Gaglin

Gerd Huebner

A device for handling disk-shaped objects in a handling plane of a local clean room has the object of ensuring process steps preceding or following the processing and inspection of the disk-shaped objects under the conditions of a local clean room with the use of SMIF boxes. The handling plane (H--H) is in a fixed constructional relationship with a reference plane (E--E) of at least one device comprising the magazine seat as a component part, which device serves to index the shelves of magazines and disk-shaped objects contained therein and is arranged above an intermediate base dividing the clean room into two partial spaces located one above the other, in which an air flow component of an air flow is directed from the partial space above the intermediate base into the partial space below the intermediate base. The device can be used in the manufacture of integrated circuits, particularly for handling tasks.

Device for handling disk-shaped objects in a handling plane of a local

A device for preventing shearing or pinching of a foreign object is suitable for use in SMIF (Standard Mechanical Interface) systems. A barrier which is constructed as a solid body is fastened at and displaceable relative to one of two parts which can move past one another. The barrier is fastened to this part at a distance above electric contact elements in three-point formation, which distance is greater than the maximum braking distance required for stopping movement. The barrier is substantially adapted in shape and position at its shearing line to the part moving past it, wherein contact is broken in at least one contact element and accordingly in an otherwise closed circuit when the barrier is displaced relative to the part. Such devices serve to prevent injuries and damage in the operation of systems in which two parts move past one another at a slight distance.

Device for preventing shearing or pinching of a foreign object

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Jena, Germany

Michael Heitmann