Applied Materials, Inc.

Michael Haverty

Mark Joseph Saly

Feng Quan Liu

Bhaskar Jyoti Bhuyan

Lakmal Charidu Kalutarage

Aaron Dangerfield

Muthukumar Kaliappan

Methods of selectively depositing blocking layers on conductive surfaces over dielectric surfaces are described. In some embodiments, a 4-8 membered substituted heterocycle is exposed to a substrate to selectively form a blocking layer. In some embodiments, a layer is selectively deposited on the dielectric surface after the blocking layer is formed. In some embodiments, the blocking layer is removed.

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Mountain View, CA, United States of America

Michael Haverty