Other

Massachusetts Institute of Technology

Michael H Valois

David Crompton

A micro-optic module couples a pair of substrates to opposing sides of a fast-axis collimating lens and a beam twister. The arrangement of optical elements is oriented substantially parallel to a neutral plane defined by propagation paths of the light from each emitter of an array of laser emitters. The pair of substrates may have substantially the same coefficient of thermal expansion and coefficient of thermal conductivity, and the micro-optic module may be configured to exhibit symmetry of thermal loading about the neutral plane when the array of laser emitters emits light at an operational power level. The micro-optic module may be coupled with an array of laser emitters, for example a laser diode bar. The module exhibits thermal properties that facilitate a consistently focused light beam with minimal positional drift, which may enable efficient and reliable coupling of the light beam to optical fibers and other high-tolerance applications.

Symmetric micro-optic module

This rotary flexure bearing consists of concentric inner and outer hubs connected by compound flexure stages. These compound flexure stages provide the angular compliance required for bearing rotation as well as compliance for flexure foreshortening while holding a constant axis of rotation over the entire range of motion. This design offers large angular displacement, low operating stress, low operating torque, and high stiffness in the five noncompliant degrees of freedom. The rotary flexure bearing described herein has applications in precision mechanics, particularly opto-mechanics. Specific applications include but are not limited to wafer and reticle alignment stages used in microlithography systems, mirror pointing and scanning mechanisms used in tactical and spaceborne systems, as well as flip-in mechanisms used in multiple field of view optical systems.

Rotary flexure bearing

This compound linear flexure bearing incorporates a simple but unique flexure arrangement which inherently allows stable long travel operation. The flexure arrangement passively constrains all degrees of freedom except translation along the bearing axis while also compensating for flexure foreshortening. This design permits large displacement, low operating stress, low operating force, and high stiffness in the five noncompliant degrees of freedom. The linear flexure bearing described herein has applications in precision mechanics, particularly opto-mechanics. Specific applications include but are not limited to wafer and reticle positioning stages used in microlithography systems, optic translation and scanning mechanisms used in tactical and spaceborne systems, as well as flip-in mechanisms used in multiple field of view optical systems.

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Lancaster, MA, United States of America

Michael H Valois