Micron Technology Incorporated

Michael H Martin

Brett Crump

Maintaining proper planarity of elements of a microelectronic component test system helps ensure reliable operation of the test system. Aspects of the invention provide test systems and methods for verifying planarity of, for example, a head and a support surface of a microelectronic component test system. In one exemplary method, a probe card is mounted to and electrically coupled to a head of a microelectronic component test system. The probe card has an array of probes. A contact surface of the support is moved with respect to the head and a change in contact condition of each of the probes is recorded in a first data set. The orientation of the probe card with respect to the contact surface is changed, the contact surface is moved with respect to the head again and a change in contact condition of each of the probes is recorded in a second data set.

Planarity diagnostic system, e.g., for microelectronic component test systems

Methods of verifying planarity of a microelectronic component support of a microelectronic component test system with respect to a head of the test system are disclosed herein. In one embodiment, a method includes juxtaposing a probe card with a contact surface that is carried by the microelectronic, component support. The probe card has probes extending toward the contact surface. The method further includes changing a distance along a Z axis between the probe card and the contact surface and recording in a first data set a Z coordinate of the contact surface at which each probe changes a contact condition with respect to a first location on the contact surface. The method also includes spacing the probes from the contact surface, and translating at least one of the probe card and the contact surface with respect to an X-Y plane. Thereafter, the method includes changing a distance along the Z axis between the probe card and the contact surface and recording in a second data set a Z coordinate of the contact surface at which each probe changes a contact condition with respect to a second location on the contact surface which is spaced from the first location, and processing the first data set and the second data set with a processor of the test system to determine a planarity characteristic.

Planarity diagnostic system, E.G., for microelectronic component test systems

Maintaining proper planarity of elements of a microelectronic component test system helps ensure reliable operation of the test system. This disclosure suggests test systems and methods for verifying planarity of, for example, a head and a support surface of a microelectronic component test system. In one exemplary method, a probe card is mounted to and electrically coupled to a head of a microelectronic component test system. The probe card has an array of probes. A contact surface of the support is moved with respect to the head and a change in contact condition of each of the probes is recorded in a first data set. The orientation of the probe card with respect to the contact surface is changed, the contact surface is moved with respect to the head again, and a change in contact condition of each of the probes is recorded in a second data set.

Growing community of inventors

Middleton, ID, United States of America

Michael H Martin