Advanced Ceramics Corporation

The University of Texas System

Advanced Ceramico Corporation

Michael H Gilbert, Sr

Terry J Mattord

Timothy J Hejl

Paul J Walsh

John B Hedge

An article with an chemical vapor deposition (CVD) aluminum nitride coating is disclosed. The article is a heating element, wafer carrier, or electrostatic chuck. The article has a substrate made of a nitride of aluminum or boron, and further has one or more graphite elements for resistance heating or electromagnetic chucking or both. A pyrolytic boron nitride layer may be provided between the substrate and the CVD aluminum nitride coating, and may either encompass or exclude the graphite element or elements.

Articles coated with aluminum nitride by chemical vapor deposition

A pyrolytic boron nitride radiation heating unit including a dielectric base of boron nitride, a heating element of pyrolytic graphite superimposed on the dielectric base, a first outer coating surrounding said heating element composed of pyrolytic boron nitride and a second outer coating surrounding said first outer coating and having an emmissivity above at least about 0.9 at a wave length of 1.55 microns. The second outer coating is preferably selected from the group consisting of silicon carbide and boron carbide.

Pyrolytic boron nitride radiation heater

A heated view port for in-situ optical observation of a deposition chamber in a vessel under high vacuum application comprising a plurality of superimposed layers arranged in the shape of an annular band mounted around the view port substantially at the outer periphery thereof. The band includes a first layer of pyrolytic boron nitride, a second layer of pyrolytic graphite covering at least one surface of the pyrolytic boron nitride layer, an outer layer of pyrolytic boron nitride and two electrical contact terminals in contact with the pyrolytic graphite layer in an arrangement forming parallel resistive paths between the contact terminals. The terminal contacts are connected to an external source of electrical power.

Heater for high vacuum optical view port

A pyrolytic boron nitride heating unit composed of a dielectric base of boron nitride and a pyrolytic graphite heating element having contact ends for connection to an external power supply through a contact assembly comprising graphite posts connected to the contact ends with each post having a pyrolytic boron nitride coating and exposed attachment ends spaced a predetermined minimum distance from the contact ends for connection to the power supply. The contact assembly preferably also includes flexible graphite washers for connection between the contact ends and the graphite posts.

Pyrolytic boron nitride heating unit

The present invention relates to a method for forming a uniform protective outer coating of pyrolytic graphite on a graphite chuck which is used for supporting a started filament in the manufacture of carbon free polycrystalline silicon.

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North Olmsted, OH, United States of America

Michael H Gilbert, Sr