Forschungszentrum Julich Gmbh

Other

Michael Gotz Berger

Hans Luth

Hans L&uuml;th

Michael Kr&uuml;ger

Markus Th&ouml;nissen

Michel Marso

Markus Thonissen

R&uuml;diger Arens-Fischer

Michael Kruger

Stephan Frohnhoff

Herbert Munder

Wolfgang Theiss

Rudiger Arens-Fischer

Peter Kordos

Michael Josef Schoning

Walter Lang

Andreas Schuppen

Marion Thust

Stefan Hilbrich

Robert Romestain

Gilles Lerondel

A multiplicity of components form a photodiode array on a substrate. Each of the components consists of a transistor of the p-n-p type with the outermost p-doped layer being transformed into an optical filter by control of the anodic etching operation utilizing transistor characteristics of the respective transistor. The result can provide red, blue and green filters in a color camera.

Process for making a color selective Si detector array

An interference filter having a layer with an area consisting of a porous material extending from the surface of the layer to the interior, the dimensions of the porous layer area in a direction normal to the layer surface have different values to provide for varying reflection or, respectively, transmission characteristics.

Method for the production of a porous layer

A porous layer produced from silicon, germanium or aluminum by applying a wedge-shaped mask to the surface of the layer and by controlled elecrochemical etching along the mask.

Process for producing a porous layer by an electrochemical etching process

Color-selective SI detector array

Chemical sensor based on porous silicon

A process for producing a structured area of porous silicon on a substrate, in which silicon is etched and structured by means of illumination, includes selectively aiming the illumination during or after the formation of the porous silicon directly at a selected area of a p-doped substrate in order to effect etching and structuring of the porous silicon in another area. A device for carrying out the process includes an illuminating system for supporting the etching process and for structuring the porous silicon, in which the illuminating system is selectively aimed during or after the formation of the porous silicon directly at a selected area of p-doped substrate in order to effect etching and structuring of the porous silicon in another area.

Process and device for the lighting-supported structuring of porous

Chemical sensors, in particular silicon-based biosensors

Layered system with an electrically activatable layer

Optical component comprising layers of porous silicon

Growing community of inventors

Wachtberg-Pech, Germany

Michael Gotz Berger