Government of the United States of America, As Represented by the Secretary of Commerce

Cornell University

Michael Gaitan

John S Suehle

Richard E Cavicchi

Stephen Semancik

Edwin D Bowen

Veljko Milanovic

Richard A Allen

Michael W Cresswell

Laurie E Locascio

Loren W Linholm

Jon C Geist

Wyatt N Vreeland

Benjamin James Reschovsky

Nim H Tea

Andreas Jahn

Akobuije Douglas Eziani Chijioke

Jeffry Joseph Sniegowski

Ralph Barry Johnson

Samuel Martin Stavis

William B Penzes

Elizabeth Strychalski

Darwin R Reyes-Hernandez

Joseph E Reiner

John Elliott

Gregory Ernest Poirier

R N Ghoshtagore

Jennifer Hong Gordon

Petra S Dittrich

Conni Hanke

Ronald C Chung

A calibration apparatus for calibrating a laser Doppler vibrometer includes: a frequency shifter stage that: receives, from the laser Doppler vibrometer, primary laser light; produces frequency shifted light; communicates the frequency shifted light to a reflector; receives frequency shifted light reflected by the reflector; produces secondary light; and communicates the secondary light to the laser Doppler vibrometer, such that the laser Doppler vibrometer receives the secondary light from the frequency shifter stage and produces a synthetic velocity shift from the secondary light; and the reflector that receives and reflects the frequency shifted light back to the frequency shifter stage.

Calibration apparatus and calibrating a laser doppler vibrometer

Methods for the formation of liposomes that encapsulate reagents in a continuous 2-phase flow microfluidic network with precision control of size, for example, from 100 nm to 300 nm, by manipulation of liquid flow rates are described. By creating a solvent-aqueous interfacial region in a microfluidic format that is homogenous and controllable on the length scale of a liposome, fine control of liposome size and polydispersity can be achieved.

Controlled vesicle self-assembly in continuous two phase flow microfluidic channels

Various aspects are described for selectivity capturing cells or bioparticles on designated surfaces in dielectrophoretic systems and processes. A particular adhesive composition is described for enhancing cell retention. In addition, certain permeable polyester membranes used in the systems and processes are also described.

Dielectrophoretic cell capture

An apparatus to create a homogenous liposome population without post-processing using laminar flow/diffusive mixing, and for reducing waste discharge of the therapeutic or compound to be encapsulated and delivered by the liposomes.

Microfluidic apparatus to control liposome formation

A nanofabrication process for use with a photoresist that is disposed on a substrate includes the steps of exposing the photoresist to a grayscale radiation pattern, developing the photoresist to remove a irradiated portions and form a patterned topography having a plurality of nanoscale critical dimensions, and selectively etching the photoresist and the substrate to transfer a corresponding topography having a plurality of nanoscale critical dimensions into the substrate.

Nanofabrication process and nanodevice

A method for forming a single cavity in a substrate, which may extend approximately the length of a device located on top of the substrate, and device produced thereby. The device has a length and a width, and may extend approximately the length of the substrate. After locating the device on the surface of the substrate, a first etchant is applied through openings on the surface of the substrate. Subsequently, a second etchant is applied through the same openings on the surface of the substrate. As a result, a single cavity is formed beneath the surface of the device, suspending the device and minimizing electrical coupling.

Power sensor

A method is provided for the manufacture of a convective accelerometer and tilt sensor device using CMOS techniques. An integrated circuit chip is produced which includes a silicon substrate having an integrated circuit pattern thereon including a heater element located centrally of the substrate and at least first and second thermocouple elements located on the substrate on opposite sides of the heater element. Thereafter, portions of the substrate surrounding and beneath the heater and thermocouple elements are etched away to suspend the element on the substrate and thus to thermally isolate the elements from the substrate. The substrate is etched up to the cold thermocouple junction of the thermocouple elements so the cold junction remains on the substrate.

Method of manufacture of convective accelerometers

Maskless method for fabricating a low-loss microwave power sensor device

A differential scanning microcalorimeter produced on a silicon chip enables microscopic scanning calorimetry measurements of small samples and thin films. The chip may be fabricated using standard CMOS processes. The microcalorimeter includes a reference zone and a sample zone. The reference and sample zones may be at opposite ends of a suspended platform or may reside on separate platforms. An integrated polysilicon heater provides heat to each zone. A thermopile consisting of a succession of thermocouple junctions generates a voltage representing the temperature difference between the reference and sample zones. Temperature differences between the zones provide information about the chemical reactions and phase transitions that occur in a sample placed in the sample zone.

Micron-scale differential scanning calorimeter on a chip

An improved test structure for measurement of width of conductive lines formed on substrates as performed in semiconductor fabrication, and an improved reference grid for calibrating instruments for such measurements, is formed from a monocrystalline starting material, having an insulative layer formed beneath its surface by ion implantation or the equivalent, leaving a monocrystalline layer on the surface. The monocrystalline surface layer is then processed by preferential etching to accurately define components of the test structure. The substrate can be removed from the rear side of the insulative layer to form a transparent window, such that the test structure can be inspected by transmissive-optical techniques. Measurements made using electrical and optical techniques can be correlated with other measurements, including measurements made using scanning probe microscopy. Nested quadrilateral calibration reference grids particularly useful in calibrating optical coordinate measurement instruments are disclosed.

Monocrystalline test and reference structures, and use for calibrating

A thermal cell has an infrared source element for producing an infrared signal and a spatial decorrelator element which spatially decorrelates the generated infrared signal to increase the fill factor of the thermal cell. The infrared source element includes an infrared generating cell, with a resistive element. The spatial decorrelator element is disposed above and spaced apart from the infrared source element and has an aperture formed therein and through which the infrared signal radiates. The aperture extends substantially orthogonal to the primary surface of the source element and between primary surfaces of the decorrelator element, which are in turn substantially parallel with the source element primary surface. The side walls of the aperture reflect the infrared signal. The opening in the primary surface of the decorrelator element which is furthest from the primary surface of the source element has an area which is greater than that of the opening in the primary surface of the decorrelator element which is closest to the primary surface of the source element.

Flat panel thermal infrared generator

A design and fabrication methodology, for silicon micromachined micro-hotplates which are manufactured using commercial CMOS foundries techniques with additional post-fabrication processing. The micro-hotplates are adaptable for a host of applications. The methodology for the fabrication of the micro-hotplates is based on commercial CMOS compatible micromachining techniques. The novel aspects of the micro-hotplates are in the design, choice and layout of the materials layers, and the applications for the devices. The micro-hotplates have advantages over other similar devices in the manufacture by a standard CMOS process which include low-cost and easy integration of VLSI circuits for drive, communication, and control. The micro-hotplates can be easily incorporated into arrays of micro-hotplates each with individualized circuits for control and sensing for independent operation.

Micro-hotplate devices and methods for their fabrication

A test structure for submicrometer metrology as used in integrated circuit manufacture comprises a bridge conductor divided into three segments by pairs of voltage taps. A first segment has no intermediate taps; a second segment has a number of dummy taps intermediate its ends; and a third segment has a single central tap, which may typically be formed in a different step than the remainder of the test structure, intermediate its ends. Preferably, the central tap extends from the same side of the bridge conductor as the taps at the ends of the third segment thereof. In order to evaluate a manufacturing operation, for example, to monitor the accuracy of registration of successive manufacturing steps, test signals are applied successively between the pairs of pads. Comparison of the response of the first and second segments to the test signals allows evaluation of the segment shortening effect of the taps; comparison of the response of the two portions of the third segment to the test signals allows evaluation of their lengths, and thus of the accuracy of registration of the step used to form the central tap.

Electrical test structure and method for measuring the relative

Arrays of microfabricated hotplates have been used as substrate arrays for materials processing on a microscopic scale. Properties of individual elements (pixels) of the array, such as temperature and voltage bias, are controlled by addressing a given pixel with appropriate signals. Materials are deposited onto pixels with individually controlled deposition conditions (pixel temperature, bias). Pixels are also addressed to control properties during post-deposition processing steps such as heating in vacuum or various gases to alter stoichiometry of a single material, or to alloy multiple composition materials. The addressable heating characteristics may also be used for a maskless lithography on pixel elements. The result is an array of separately, but simultaneously, processed films. Properties of film elements may be measured using electrical contact pads. The array of processed films may be used for sensors, electronic devices, greatly accelerated materials development processes, and solid state physics, biology and chemistry studies.

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North Potomac, MD, United States of America

Michael Gaitan