Panametrics, Inc.

Rca Inc.

Michael G Kovac

David J Chleck

Philip Goodman

Disclosed are humidity sensor structures, and fabrication techniques, which result in uniform and reliable humidity sensing, reliable electrical connections in small sensors, and simplified and inexpensive manufacture.

Absolute humidity sensors and methods of manufacturing humidity sensors

Structure which permits the 180.degree. turns in a charge coupled device (CCD) serpentine delay line to be made with a relatively small effective radius of curvature and yet have them operate with little charge transfer loss. The small radius allows adjacent legs of the delay line to be spaced relatively close to one another so that a relatively long length of line can be fabricated on a relatively small substrate area.

Growing community of inventors

Sudbury, MA, United States of America

Michael G Kovac