Xradia, Inc.

Carl Zeiss X-ray Microscopy, Inc.

Lyncean Technologies, Inc.

Xnovo Technology Aps

Danmarks Tekniske Universitet of Anker Engelundsvej

Danmarks Tekniske Universitet

Michael Feser

Wenbing Yun

Alan Francis Lyon

Yuxin Wang

Andrei V Tkachuk

Srivatsan Seshadri

Erik Mejdal Lauridsen

Frederick William Duewer

Christian Holzner

Ziyu Wu

Peiping Zhu

Qingxi Yuan

Wanxia Huang

Sharon Chen

Thomas Anthony Case

Ronald D Ruth

Roderick J Loewen

Hauyee Chang

Stefan Othmar Poulsen

Benjamin Hornberger

A high power extreme ultraviolet (EUV) beam is produced. An electron beam is injected in a compact electron storage ring configured for emission of free-electron laser (FEL) radiation. The electron beam is passed through a magnetic undulator on each of a plurality of successive revolutions of the electron beam around the compact electron storage ring. The electron beam is induced to microbunch and radiate coherently while passing through the magnetic undulator. A portion of the free-electron laser radiation at an extreme ultraviolet wavelength produced by an interaction of the electron beam through the magnetic undulator is outputted.

Compact storage ring extreme ultraviolet free electron laser

A correlative evaluation of a sample () using a combined x-ray computed tomography (CT) and x-ray fluorescence (XRF) system and the method for analyzing a sample () using x-ray CT and XRF is disclosed. The CT/XRF system () includes an x-ray CT subsystem () for acquisition of volume information and a confocal XRF subsystem () for characterization of elemental composition information. Geometrical calibration is carried out between the XRF subsystem () and the X-ray CT subsystem () such that a region of interest defined during X-ray CT acquisition can be retrieved by the XRF subsystem () for a subsequent XRF acquisition. The system () combines the sub-micrometer spatial resolution 3-D imaging capability of x-ray CT with the elemental composition analysis of confocal XRF to provide 3-D elemental composition analysis of a sample () with ppm level sensitivity. This is applicable to many scientific research and industrial applications, a prime example of which is the elemental identification of precious metal grains in crushed and ground ores and floatation tailings in the mining industry.

Combined confocal X-ray fluorescence and X-ray computerised tomographic system and method

A compound x-ray lens and method of fabricating these lenses are disclosed. These compound lenses use multiple zone plate stacking to achieve a pitch frequency increase for the resulting combined zone plate. The compound equivalent zone plate includes a first zone plate having an initial pitch frequency stacked onto a second zone plate to form an equivalent compound zone plate. The equivalent zone plate has a pitch frequency that is at least twice the initial pitch frequency. Also, in one example, the equivalent zone plate has a mark-to-space ratio of 1:1.

Stacked zone plates for pitch frequency multiplication

A correlative evaluation of a sample using an x-ray computed tomography (CT) x-ray fluorescence (XRF) system and the method for analyzing a sample using x-ray CT and XRF is disclosed. The CT/XRF system includes an x-ray CT subsystem for acquisition of volume information and a confocal XRF subsystem for acquisition of elemental composition information. The CT/XRF system also includes a controller for managing the acquisitions by the x-ray CT subsystem and confocal XRF subsystem. Combining sub-micrometer spatial resolution 3-D imaging with elemental composition analysis in 3-D with ppm level sensitivity is important to elemental identification of precious metal grains in crushed and ground ores and floatation tailings in the mining industry.

Confocal XRF-CT system for mining analysis

A method and system for three dimensional crystallographic grain orientation mapping illuminates a polycrystalline sample with a broadband x-ray beam derived from a laboratory x-ray source, detects, on one or more x-ray detectors, diffracted beams from the sample, and processes data from said diffracted beams with the sample in different rotation positions to generate three dimensional reconstructions of grain orientation, position, and/or 3-D volume. A specific, cone beam, geometry leverages the fact that for a point x-ray source with a divergent beam on reflection of an extended crystal grain diffracts x-rays such that they are focused in the diffraction plane direction.

Laboratory X-ray micro-tomography system with crystallographic grain orientation mapping capabilities

An X-ray diffraction method of mapping grain structures in a polycrystalline material sample, where an X-ray detector detects substantially line-shaped segments from beams diffracted from at least some of the grains. A processing device analyzes values received from the X-ray detector and identifies at least the position and the length of the line-shaped segments. The line-shaped segments are paired as originating from diffractions from the same grain and the positions of the paired line-shaped segments are used in determining the crystallographic grain position of this grain within in the polycrystalline material sample. The length of the paired line-shaped segments is used in determining a width of this grain.

X-ray diffraction method of mapping grain structures in a crystalline material sample, and an X-ray diffraction apparatus

Laboratory x-ray micro-tomography system with crystallographic grain orientation mapping capabilities

A compound zone plate comprising a first zone plate frame including a first zone plate, a second zone plate frame including a second zone plate, and a base frame to which the first zone plate frame and the second zone plate frame are bonded. In examples, two more zone plates are added to make a four element optic. In the assembly process, the microbeads are used to ensure the parallelism, dial in the distance precisely between the zone plates by selecting the microbead size, possibly in response to the width of the frames, and ensure low friction lateral movement enabling nanometer precision alignment of the zone plates with respect to each other prior to being fixed by the adhesive. That is, when the frames are pressed together to ensure parallelism, it is still possible to align them to each other since the microbead layer facilitates the inplane movement of the alignment process.

Compound x-ray lens having multiple aligned zone plates

Compound X-ray lens having multiple aligned zone plates

A process to determine the porosity and/or mineral content of mineral samples with an x-ray CT system is described. Based on the direct-projection techniques that use a spatially-resolved x-ray detector to record the x-ray radiation passing through the sample, 1 micrometer or better resolution is achievable. Furthermore, by using an x-ray objective lens to magnify the x-ray image in a microscope configuration, a higher resolution of up to 50 nanometers or more is achieved with state-of-the-art technology. These x-ray CT techniques directly obtain the 3D structure of the sample with no modifications to the sample being necessary. Furthermore, fluid or gas flow experiments can often be conducted during data acquisition so that one may perform live monitoring of the physical process in 3D.

Process for examining mineral samples with X-ray microscope and projection systems

An x-ray imaging system uses a synchrotron radiation beam to acquire x-ray images and at least one integrated x-ray source. The system has an imaging system including sample stage controlled by linear translation stages, objective x-ray lens, and x-ray sensitive detector system, placed on a fixed optical table and a mechanical translation stage system to switch x-ray sources when synchrotron radiation beam is not available.

X-ray microscope with switchable x-ray source

Mechanism for switching sources in x-ray microscope

The principle of reciprocity states that full-field and scanning microscopes can produce equivalent images by interchanging the roles of condenser and detector. Thus, the contrast transfer function inversion previously used for images from scanning systems can be applied to Zernike phase contrast images. In more detail, a full-field x-ray imaging system for quantitatively reconstructing the phase shift through a specimen comprises a source that generates x-ray radiation, a condenser x-ray lens for projecting the x-ray radiation onto the specimen, an objective x-ray lens for imaging the x-ray radiation transmitted through the specimen, a phase-shifting device to shift the phase of portions of x-ray radiation by a determined amount, and an x-ray detector that detects the x-ray radiation transmitted through the specimen to generate a detected image. An image processor then determines a Fourier filtering function and reconstructs the quantitative phase shift through the specimen by application of the Fourier filtering function to the detected image. As a result, artifacts due to absorption contrast can be removed from the detecting image. This corrected image can then be used in generating three dimensional (3D) images using computed tomography.

System and method for quantitative reconstruction of Zernike phase-contrast images

An x-ray source comprises a structured anode that has a thin top layer made of the desired target material and a thick bottom layer made of low atomic number and low density materials with good thermal properties. In one example, the anode comprises a layer of copper with an optimal thickness deposited on a layer of beryllium or diamond substrate. This structured target design allows for the use of efficient high energy electrons for generation of characteristic x-rays per unit energy deposited in the top layer and the use of the bottom layer as a thermal sink. This anode design can be applied to substantially increase the brightness of stationary, rotating anode or other electron bombardment-based sources where brightness is defined as number of x-rays per unit area and unit solid angle emitted by a source and is a key figure of merit parameter for a source.

Structured anode X-ray source for X-ray microscopy

An x-ray microscope uses a microfocus x-ray source with a focus spot of less than 10 micrometers and a Wolter condenser having a magnification of about four or more for concentrating x-rays from the source onto a sample. A detector is provided for detecting the x-rays after interaction with the sample, and an x-ray objective is used to form an image of the sample on the detector. The use of the Wolter optic addresses a problem with microfocus sources that arise when the size of the focal spot that must then be imaged onto the sample with the condenser is smaller than the field of view.

Growing community of inventors

Orinda, CA, United States of America

Michael Feser