Robert Boschgmbh

Michael Fehrenbach

Karsten Funk

Joerg Hauer

Markus Lutz

Burkhard Kuhlmann

Reinhard Neul

Jochen Franz

Wolfram Bauer

Christian Doering

Rainer Willig

Udo Bischof

Gerhard Wucher

Andreas Thomae

Siegbert Goetz

Udo-Martin Gomez

Dietrich Schubert

Stefan Pinter

Helmut Baumann

Matthias Illing

Georg Bischopink

Reinhard Rieger

Albert Geiger

Heinz-Georg Vossenberg

Martin Schoefthaler

Ralf Schellin

Nicholas Buchan

Juergen Landsgesell

Udo Gomez

Burhard Kuhlmann

An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

Micromechanical rotational rate sensor

A method for improving the resolution of an A/D converter and/or a converter system having an S/H device and an A/D converter is described. In order to improve the resolution of the A/D converter, an auxiliary signal is superposed on an analog signal, and the superposed signal is sampled and converted into digital output values using the A/D converter. Based on the digital output values, it is possible to determine an output value having higher resolution, e.g., by averaging.

A/D converter with improved resolution by sampling a superposed signal

A micromechanical yaw rate sensor having: a substrate having an anchoring device provided on the substrate; and an annular flywheel that is connected, via a flexural spring system, with the anchoring device in such a way that the area of connection with the anchoring device is located essentially in the center of the ring, so that the annular flywheel is able to be displaced, elastically from its rest position, about an axis of rotation situated perpendicular to the substrate surface, and about at least one axis of rotation situated parallel to the substrate surface. The anchoring device has two bases that are situated opposite one another and are connected fixedly with the substrate, connected with one another via a bridge. A V-shaped flexural spring of the flexural spring system is attached to each of the opposite sides of the bridge in such a way that the apex is situated on the bridge and the limbs are spread towards the flywheel with an opening angle.

Micromechanical rotation rate sensor

A yaw-rate sensor is proposed having a first and a second Coriolis element ( ) which are arranged side-by-side above a surface ( ) of a substrate. The Coriolis elements ( ) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements ( ) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements ( ) are coupled by a spring ( ) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Rotation speed sensor

A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.

Rotation rate sensor

An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.

Rotational speed sensor

A micromechanical device, in particular an acceleration sensor, includes a seismic mass which is resiliently supported on a substrate via a first flexural spring device and which can be deflected in at least one direction by an acceleration, the deflection being able to be limited by a stop device. The stop device has at least one limit stop that is resiliently supported on the substrate via a second flexural spring device, the second flexural spring device having a greater flexural strength than the first flexural spring device.

Micromechanical device

A method for producing a micromechanical component (e.g., a capacitive acceleration sensor) having one or several electrical or mechanical function variables dependent on at least one geometric design parameter. The micromechanical component is produced by an etching process via which a structure with bars and trenches is formed. The structure is formed by drafting a design for the micromechanical component in such a way that the geometric design parameter within the local area of the micromechanical component is subject to a predetermined process-related regularity. The design parameter is essentially constant in relation to function blocks in particular, so that in the etching process, the process tolerance of the design parameter within the micromechanical component essentially shows no locus dependency.

Micromechanical component and method for producing the micromechanical component

A micromechanical component, in particular an acceleration sensor, includes a substrate, at least one spring element and at least one seismic mass. The spring element is joined at a first end to the substrate and at a second end to the mass, and the rigidity of the spring element is set such that a movement of the mass relative to the substrate can be caused by an acceleration parallel to a surface of the substrate. For the spring element, provision is made for a spring limit stop which limits a deformation of the spring element in response to an acceleration parallel to the surface of the substrate.

Micromechanical component

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Mittelstadt, Germany

Michael Fehrenbach