Plansee Se

Michael Eidenberger-Schober

Michael O'Sullivan

Karl Huber

Joerg Winkler

Robert Storf

Michael O'sullivan

A powder-metallurgical sintered molybdenum part which is present as a solid body has the following composition: a molybdenum content of ≥99.93% by weight, a boron content 'B' of ≥3 ppmw and a carbon content “C” of ≥3 ppmw, with a total content “BaC” of carbon and boron being in a range of 15 ppmw≤“BaC”≤50 ppmw, an oxygen content “O” in a range of 3 ppmw≤“O”≤20 ppmw, a maximum tungsten content of ≤330 ppmw and a maximum proportion of other impurities of ≤300 ppmw. A powder-metallurgical process for producing such a sintered molybdenum part is also provided.

Sintered molybdenum part

A sputtering target containing molybdenum and at least one metal from the group tantalum and niobium. The average content of tantalum and/or niobium is from 5 to 15 at % and the molybdenum content is greater than or equal to 80 at %. The sputtering target has at least a matrix with an average molybdenum content of greater than or equal to 92 at % and particles which are composed of a solid solution containing at least one metal from the group of tantalum and niobium, and molybdenum, with an average molybdenum content of greater than or equal to 15 at % and are embedded in the matrix. There is also described a method of producing a sputtering target.

Growing community of inventors

Breitenwang, Austria

Michael Eidenberger-Schober