Carl-zeiss-stiftung

Michael Ebert

Franz Sorg

Michael Trunz

Karlfried Osterried

Frank Marianek

Markus Kasparek

A device for the low-deformation support of an optical element ( ), in particular of an end plate of a lens in a projection printing system for semiconductor elements, is provided with a mount ( ), the optical element ( ) being connected to the mount ( ) at least partly via a bonding layer which is located between the adjacent circumferential walls ( ) of mount ( ) and optical element ( ). The mount ( ) is provided with at least three bearing feet ( ) which are distributed over the circumference and on which the optical element ( ) rests. The bonding layer is located in an annular gap ( ) between the adjacent circumferential walls ( ) of mount ( ) and optical element ( ) over at least one section thereof.

Growing community of inventors

Aalen, Germany

Michael Ebert