Intel Corporation

Michael E Favaro

John Heck

Haisheng Rong

Charles H Dennison

Derchang Kau

Sergei L Sochava

Jeffrey B Driscoll

Harel Frish

Jonathan K Doylend

Hari Mahalingam

George A Ghiurcan

Stefan Meister

Wesley Harrison

Joshua Keener

Randal Appleton

Silicon photonic integrated circuit (PIC) on a multi-zone semiconductor on insulator (SOI) substrate having at least a first zone and a second zone. Various optical devices of the PIC may be located above certain substrate zones that are most suitable. A first length of a photonic waveguide structure comprises the crystalline silicon and is within the first zone, while a second length of the waveguide structure is within the second zone. Within a first zone, the crystalline silicon layer is spaced apart from an underlying substrate material by a first thickness of dielectric material. Within the second zone, the crystalline silicon layer is spaced apart from the underlying substrate material by a second thickness of the dielectric material.

Silicon photonic integrated circuits on substrates with structured insulators having specific thicknesses in separate zones

Embodiments include apparatuses, methods, and systems including a semiconductor photonic device having a substrate, a waveguide disposed above the substrate, a phase change layer disposed above the waveguide, and a heater disposed above the phase change layer. The waveguide has a modifiable refractive index based at least in part on a state of a phase change material included in the phase change layer. The phase change material of the phase change layer is in a first state of a set of states, and the waveguide has a first refractive index determined based on the first state of the phase change material. The heater is to generate heat to transform the phase change material to a second state of the set of states, and the waveguide has a second refractive index determined based on the second state of the phase change material. Other embodiments may also be described and claimed.

Semiconductor photonic devices using phase change materials

Growing community of inventors

Edgewood, NM, United States of America

Michael E Favaro