Cymer, Inc.

Michael Du'Lyea

Igor Vladimirovich Fomenkov

Richard G Morton

Eckehard D Onkels

Vladimir B Fleurov

Robert A Shannon

Jean-Marc Hueber

Michael C Cates

Dmitri V Gaidarenko

Ross H Winnick

B Fleurov Vladimir

A gas discharge laser having a laser chamber with two elongated erodable electrode elements, each having an erodable section and an electrode with support configured to minimize discharge region laser gas turbulence and with the electrode elements being configured to permit gradual erosion over more than 8 billion pulses without causing substantial changes in the shape of electrical discharges between the electrode elements. A pulse power system provides electrical pulses of at least 2J at rates of at least 2 KHz. A blower circulates laser gas between the electrodes at speeds of at least 2 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.

Gas discharge laser long life electrodes

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Lakeside, CA, United States of America

Michael Du'Lyea