Applied Materials, Inc.

Michael David-Scott Kemp

Ludovic Godet

Visweswaren Sivaramakrishnan

Jinxin Fu

Daihua Zhang

Kazuya Daito

Kang Luo

Mahendran Chidambaram

Alexey Stepanov

Bahubali S Upadhye

Hemantha Raju

Elsa Massonneau

Kenneth S Ledford

John Rusconi

Embodiments described herein relate to an inspection system for illumination of optical devices. The inspection system includes a stage, a focusing lens, a light source, a reflective surface, and a camera. The inspection system is operable to provide a light to a substrate. The substrate is positioned on the inspection system such that an edge of the substrate is exposed. The inspection system focuses light to the edge such that the light propagates through the substrate. The light is coupled out of the substrate, illuminating one or more optical devices disposed on the substrate. The illumination allows the camera to capture images to be inspected. The images are inspected to detect defects of the substrate.

Edge inspection system for inspection of optical devices

Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.

Inkjet platform for fabrication of optical films and structures

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San Jose, CA, United States of America

Michael David-Scott Kemp