Average Co-Inventor Count = 4.17
ph-index = 9
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Applied Materials, Inc. (51 from 13,585 patents)
2. Intel Corporation (1 from 54,472 patents)
52 patents:
1. 12437979 - Capacitive sensors and capacitive sensing locations for plasma chamber condition monitoring
2. 12405164 - Spatial optical emission spectroscopy for etch uniformity
3. 12163911 - Capacitive sensor housing for chamber condition monitoring
4. 12130561 - Gas distribution plate with UV blocker
5. 12068135 - Fast gas exchange apparatus, system, and method
6. 12009236 - Sensors and system for in-situ edge ring erosion monitor
7. 12009191 - Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall
8. 11668602 - Spatial optical emission spectroscopy for etch uniformity
9. 11581206 - Capacitive sensor for chamber condition monitoring
10. 11551905 - Resonant process monitor
11. 11545346 - Capacitive sensing data integration for plasma chamber condition monitoring
12. 11448977 - Gas distribution plate with UV blocker at the center
13. 11415538 - Capacitive sensor housing for chamber condition monitoring
14. 11387135 - Conductive wafer lift pin o-ring gripper with resistor
15. 11264252 - Chamber lid with integrated heater