Robert Boschgmbh

Michael Curcic

Christoph Schelling

Ricardo Ehrenpfordt

Jochen Zoellin

Frederik Ante

Juergen Graf

Sven Zinober

Oliver Willers

Ulrich Kunz

Tino Fuchs

Robert Roelver

Peter Degenfeld-Schonburg

Janine Riedrich-Moeller

Radoslav Rusanov

Markus Schreiber

Andreas Brenneis

A method for determining a rotational orientation change using an NMR gyroscope includes making use of a measure of determining, in a vapor cell, which is filled at least with a gaseous first element and a gaseous second element having non-vanishing nuclear spin, a nuclear spin component of the second element in the second direction and a nuclear spin component of the second element in a third direction. The second direction and the third direction are perpendicular to a first direction, which corresponds to the direction of the static magnetic field and to the polarization direction of the nuclear spin of the second element. Moreover, the second direction corresponds to the direction of an applied alternating magnetic field, the frequency of which corresponds to the Larmor frequency of the Larmor precession of the nuclear spin of the second element about the static magnetic field.

Method for determining a change in a rotational orientation in the space of an NMR gyroscope, and NMR gyroscope

A microelectromechanical system includes a piezoelectric drive and a control unit coupled to the piezoelectric drive and designed to control the piezoelectric drive based on a change of the admittance and/or the impedance of the piezoelectric drive.

Microelectromechanical system and control method to control a piezoelectric drive based on an admittance or impedance of the piezoelectric drive

A method for operating a micromechanical component (a rotation rate sensor), in which a first AC electrical voltage, having a first frequency, is applied to a drive-electrode so that an oscillation apparatus is deflected parallel to a deflection direction by the drive-electrode; a second AC electrical voltage, having a second frequency, is applied to a detection-electrode so that a force effect on the oscillation apparatus perpendicularly to the detection direction is detected by the drive-electrode, a third AC electrical voltage, having a third frequency differing from the first, is applied to the drive-electrode so that a deflection of the oscillation apparatus parallel to the deflection direction is detected by the drive-electrode; and/or that a fourth AC electrical voltage, having a fourth frequency differing from the second, is applied to the detection-electrode to exert a further force effect, opposite to the force effect, on the oscillation apparatus.

Method for operating a rotation rate sensor using different frequencies

A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon it.

Method for protecting a MEMS unit against infrared investigations and MEMS unit

A method is provided for protecting a MEMS unit against infrared investigations, at least one layer being built into the structure of the MEMS unit or at least one layer being applied on a surface of the MEMS unit. The at least one layer absorbs, reflects or diffusely scatters more than 50%, in particular more than 90% of an infrared light incident upon it.

A method is provided for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, a surface patterning being performed for at least one first area of a surface of the MEMS unit, the first area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90% of an infrared light incident upon it.

A sensor for detecting a position of an effective surface of the sensor includes a first magnetic field generator, a magnetic tunnel resistor, and a second magnetic field generator. The first magnetic field generator generates a first magnetic field that is oriented in an axis of a movement direction of the effective surface. The magnetic tunnel resistor is spaced from the first magnetic field generator in the extension of the axis. The magnetic tunnel resistor has a first magnetic layer, a second magnetic layer, and a tunnel barrier. The tunnel barrier is arranged between the first layer and the second layer, and the first layer is electrically insulated from the second layer. The second magnetic field generator is configured to generate a second magnetic field that is oriented transversally to the axis. The second magnetic field generator is oriented in a fixed manner relative to the tunnel resistor.

Sensor and method for detecting a position of an effective surface of the sensor

Measures are described which simplify the functional testing of a component having an MEMS element provided with a pressure-sensitive sensor diaphragm, and which allow a self-calibration of the component even after it is already in place, i.e., following the end of the production process. The component has a housing, in which are situated at least one MEMS element having a pressure-sensitive sensor diaphragm and a switching arrangement for detecting the diaphragm deflections as measuring signals; an arrangement for analyzing the measuring signals; and an arrangement for the defined excitation of the sensor diaphragm. The housing has at least one pressure connection port. The arrangement for exciting the sensor diaphragm includes at least one selectively actuable actuator component for generating defined pressure pulses that act on the sensor diaphragm.

Component part and method for testing such a component part

A new signal acquisition concept is provided for MEMS components having a pressure-sensitive diaphragm element, which at least partially spans a pressure connection opening. This signal acquisition concept is distinguished by an especially high sensitivity. For this purpose, the MEMS component includes a resonant vibrator device having a vibrating element, which is suspended, capable of vibrating, within a closed cavity and is equipped with at least one drive electrode and at least one sensing electrode. The vibrating element of the resonant vibrator device is coupled mechanically to the diaphragm element, so that the vibrating element is deformed in the case of a diaphragm deflection.

MEMS component

A packaging concept for MEMS components having at least one diaphragm structure formed in the front side of the component is provided, according to which the MEMS component is mounted on a support which at least laterally delimits a cavity adjoining the diaphragm structure. In addition, at least one electrical feedthrough is formed in the support which allows electrical contacting of the MEMS component through the support. To achieve the largest possible rear volume for the diaphragm structure of the MEMS component for a given chip surface area, and also to simplify the processing of the support, according to the invention the electrical feedthroughs are integrated into the wall of the cavity adjoining the diaphragm structure, in that at least one section of such a feedthrough is implemented in the form of an electrically conductive coating of a side wall section of the cavity.

Component and method for producing same

A capacitive MEMS microphone structure is provided, which micromechanical microphone structure of component is realized in a layer construction and includes: a diaphragm structure sensitive to sound pressure, which is deflectable in a direction perpendicular to the layer planes of the layer construction; an acoustically penetrable counter-element which has through holes and is formed above or below the diaphragm structure in the layer construction; and a capacitor system for detecting the excursions of the diaphragm structure. The diaphragm structure includes a structural element in the middle area of the diaphragm structure, which structural element projects perpendicularly from the diaphragm plane and which, depending on the degree of excursion of the diaphragm structure, variably extends into a correspondingly formed and positioned through hole in the counter-element.

Component having a micromechanical microphone structure

A microphone component has a micromechanical microphone pattern which is implemented in a layer construction on a semiconductor substrate and includes (i) an acoustically active diaphragm which at least partially spans a sound opening on the backside of the substrate, (ii) at least one movable electrode of a microphone capacitor system, and (iii) a stationary acoustically penetrable counterelement having through holes, which counterelement is situated in the layer construction over the diaphragm and functions as the carrier for at least one immovable electrode of the microphone capacitor system. The diaphragm is tied in to the semiconductor substrate in a middle area, and the diaphragm has a corrugated sheet metal type of corrugation, at least in regions.

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Stuttgart, Germany

Michael Curcic