University of Texas System

Lawrence Livermore National Security, LLC

Michael Cullinan

Sidlgata V Sreenivasan

Shrawan Singhal

Ovadia Abed

Paras Ajay

Aseem Sayal

Mark McDermott

Vipul Goyal

Lawrence R Dunn

Ian Seth Ladner

Robert Matthew Panas

Chee Seng Foong

Andrew C Duenner

Nilabh Kumar Roy

Sourabh Kumar Saha

Lawrence A Dunn

Anil Yuksel

Joon-Hyung Cho

Tsung-Fu Yao

David Cayll

Liam Glazer Connolly

A method for assembling heterogeneous components. The assembly process includes using a vacuum based pickup mechanism in conjunction with sub-nm precise moiré alignment techniques resulting in highly accurate, parallel assembly of feedstocks.

Heterogeneous integration of components onto compact devices using moiré based metrology and vacuum based pick-and-place

A method for assembling heterogeneous components. The assembly process includes using a vacuum based pickup mechanism in conjunction with sub-nm precise more alignment techniques resulting in highly accurate, parallel assembly of feedstocks.

Heterogeneous integration of components onto compact devices using moire based metrology and vacuum based pick-and-place

A method of manufacturing a nanoelectromechanical resonator allows for uniform tuning of a resonant frequency. The nanoelectromechanical resonator can be mass produced and used to sense the presence of a selected gas.

Graphene microelectromechanical system (MEMS) resonant gas sensor

A microscale selective laser sintering (&#x3bc;-SLS) that improves the minimum feature-size resolution of metal additively manufactured parts by up to two orders of magnitude, while still maintaining the throughput of traditional additive manufacturing processes. The microscale selective laser sintering includes, in some embodiments, ultra-fast lasers, a micro-mirror based optical system, nanoscale powders, and a precision spreader mechanism. The micro-SLS system is capable of achieving build rates of at least 1 cm/hr while achieving a feature-size resolution of approximately 1 &#x3bc;m. In some embodiments, the exemplified systems and methods facilitate a direct write, microscale selective laser sintering &#x3bc;-SLS system that is configured to write 3D metal structures having features sizes down to approximately 1 &#x3bc;m scale on rigid or flexible substrates. The exemplified systems and methods may operate on a variety of material including, for example, polymers, dielectrics, semiconductors, and metals.

Micro-selective sintering laser systems and methods thereof

An example metrology device can include a first stage including a microelectromechanical (MEMS) device having a probe, and a second stage configured to hold a sample. The metrology device can also include a kinematic coupler for constraining the first stage in a fixed position relative to the second stage. The probe of the MEMS device can be aligned with a portion of the sample when the first stage is constrained in the fixed position relative to the second stage.

Metrology devices for rapid specimen setup

Disclosed herein are devices, systems and methods for in-line, nanoscale metrology. One system comprises monolithic flexure mechanisms with integrated actuators that allow movement and positioning in two axes, with an extremely high degree of accuracy, of a structure comprising one or more scanning probes. This structure is suspended to prevent any destructive interference from a sample, which can be stationary or moving at a nonzero rate, and rigid or flexible in mechanical behavior. This system can be activated at startup and quickly actuate the structure to approach the surface of the sample. Once the system achieves the desired proximity between the one or more probes and the sample, the system maintains that position of the structure to a high degree of accuracy regardless of any disturbances. This array can be moved at varying speeds laterally to match the velocity of any continually moving substrates, thus enabling scanning of moving substrates.

Coupled multiscale positioning of arrays of parallel, independently actuated and simultaneously driven modular scanning probe microscopes for high-throughput, in-line, nanoscale measurement of flexible, large area, and roll-to-roll processes

This invention relates to a microelectromechanical device for mechanical characterization of a specimen. In one embodiment the device may incorporate a substrate, at least one first flexure bearing and at least one second flexure bearing, both being supported on the substrate. First and second movable shuttles may be used which are supported above the substrate by the flexure bearings so that each is free to move linearly relative to the substrate. Ends of the movable shuttles are separated by a gap. A thermal actuator may be connected to one end of the first movable shuttle, and operates to cause the first movable shuttle to move in a direction parallel to the surface of the substrate in response to a signal applied to the thermal actuator. A first capacitive sensor may be formed between the first movable shuttle and the substrate, and a second capacitive sensor formed between the second movable shuttle and the substrate.

Microscale sensors for direct metrology of additively manufactured features

Growing community of inventors

Austin, TX, United States of America

Michael Cullinan