Applied Materials, Inc.

Michael Carrell

Jason M Schaller

Charles T Carlson

William Tyler Weaver

Juan Carlos Rocha-Alvarez

Jeffrey C Hudgens

Benjamin B Riordon

Paul Zachary Wirth

Dmitry A Dzilno

Gary Wyka

Paul Forderhase

Mitchell DiSanto

Siva Chandrasekar

Venkata Raghavaiah Chowdhary Kode

Victor Flores Iracheta

An ion implantation system including an ion source for generating an ion beam, an end station containing a platen for supporting a substrate to be implanted by the ion beam, and a load lock disposed adjacent the end station and adapted to transfer substrates between an external environment and the end station. The load lock may include a transfer chamber having a hollow interior, a first isolation door affixed to a first side of the transfer chamber and openable to the external environment, a second isolation door affixed to a second side of the transfer chamber and openable to an interior of the end station, and a volume filling cassette disposed within the hollow interior of the transfer chamber and adapted to hold at least one substrate.

Volume filling cassette for load lock

A system for transferring semiconductor workpieces from a load lock to an orientation station and on to a platen is disclosed. The system comprises two load locks, two robots, and one orientation station. Each robot is associated with a respective load lock and follows a fixed sequence. The robot returns a processed workpiece to the load lock and also removes an unprocessed workpiece. The robot then moved to the orientation station, where it removes an aligned workpiece from the orientation station and deposits the unprocessed workpiece on the orientation station. Next, the robot moves to the platen, where it removes a processed workpiece and deposits the aligned workpiece. The robot then returns to the load lock and repeats this sequence.

Workpiece handling architecture for high workpiece throughput

A system for transferring semiconductor workpieces from a load lock to an orientation station and onto a platen is disclosed. The system comprises two load locks, a multi-workpiece orientation station, two multi-pick robots that transfer a plurality of workpieces between a respective load lock and the multi-workpiece orientation station, and two backend robots that transfer individual workpieces between the multi-workpiece orientation station and the platen.

Substrate transfer structure

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Leander, TX, United States of America

Michael Carrell