Eaton Corporation

Gca Corporation

Summit Technology, Inc.

Michael C King

Julian G Blake

Peter J Klopotek

Peter H Rose

An ion source for generating an ion beam of primary ions is disclosed that includes a plasma chamber and magnets positioned therein for separating the primary ions of the plasma from secondary ions within the plasma. An electrode assembly extracts the primary ions through an extractor outlet port of the plasma chamber to form an ion beam, which preferentially is shaped as a ribbon beam. The primary ions are accelerated in the form of a ribbon beam toward the target workpiece for doping the device. The magnets are oriented in the chamber to produce a uniform current density of primary ions parallel to the elongated axis of the ribbon beam.

Plasma chamber for controlling ion dosage in ion implantation

Methods and apparatus are disclosed for the correction of presbyopia by reprofiling the cornea to create at least one region having a different focal point, and thereby assist the eye in accommodating for close-viewing conditions. According to the invention, at least one region of different curvature is created by photoablation of the cornea to permit the eye to accommodate for near objects. This 'add' region is preferably located near the center of the optical zone and preferably within Bowman's membrane or the adjacent upper portions of the stroma, which lies directly below Bowman's membrane. Apparatus is disclosed, including a laser means and a beam-shaping means, disposed between the laser means and the surface of the cornea, which imposes a defined ablation profile upon the cornea. The system can also include a feedback control means for measuring the effectiveness of the laser during operation and for controlling the laser. The beam-shaping means can include either an aperture e.g., a beam-shaping stop means alone or in combination with a beam-shaping window, or an mask which is photodecomposable or otherwise graded in its absorptive capacity to present a predefined profile of resistance to the laser radiation.

Correction of presbyopia by photorefractive keratectomy

In the microlithographic system disclosed herein, the spaces between elements in a projection lens are filled with flowing helium gas which substantially reduces the refraction errors caused by barometric changes in the atmosphere, even though the portions of the optical path outside the lens are exposed to the atmosphere.

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Carlisle, MA, United States of America

Michael C King