Cymer, Inc.

Michael C Binder

Palash P Das

Jason R Carlesi

Mengxiong Gong

Tom A Watson

Shahryar Rokni

Muljadi Tantra

David J Tammadge

Daniel G Patterson

An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F.sub.2 'sweet spot' in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines .DELTA.E/.DELTA.V, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on .DELTA.E/.DELTA.V without the need to actually measure the fluorine concentration.

Automatic fluorine control system

An excimer laser system with a fluorine control having a fixed volume inject bottle in which fluorine is injected prior to it being injected into the laser chamber. A manifold and feedback control system is provided to permit precise injection at rates approaching continuous fluorine injection. The system permits the laser to be operated in a small sweet spot as measured by a narrow range of charging voltage.

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San Diego, CA, United States of America

Michael C Binder