Carl Zeiss Microimaging Gmbh

Carl Zeiss Smt Gmbh

Carl Zeiss Jena Gmbh

Michael Brehm

Andreas Nolte

Ralf Netz

Ulrich Weber

Ingo Fahlbusch

Joerg Steinert

Rolf Wartmann

Wolfgang Bathe

Matthias Kramer

Peter Dietrich

Werner Kleinschmidt

Matthias Gonschor

Wolfgang Merkel

Carsten Hoyer

Heino Heise

Christian Boeker

Jörg Steinert

Henry Wegert

Lutz Hoering

Mario Sondermann

An optical assembly () includes an optical element (), a mount () configured to hold the optical element (), and a plurality of fastening elements () with fastening areas () configured to fasten the optical element () to the mount (). The fastening elements () bridge an interstice () between the optical element () and the mount (), and a purge device () produces at least one purge gas flow () in the region of the optical element () such that the purge gas flow flows around the fastening areas () of the fastening elements ().

Optical assembly, projection system, metrology system and EUV lithography apparatus

The invention is directed to a multispectral illumination device for a microscope or for a reader. According to the invention, the illumination device comprises at least three receptacle positions for lighting modules and at least one receptacle position for coupling modules, the mechanical devices for connecting the lighting modules or coupling modules at the receptacle positions to the illumination device being designed in such a way that the lighting modules or coupling modules can be easily changed. Further, the receptacle positions are arranged in such a way that, with suitable selection of the lighting modules and coupling modules, all individual spectra of the lighting modules in a total spectrum are available simultaneously at the output of the illumination device.

Multispectral lighting apparatus

The present invention is directed to a controllable microscope illumination within a microscope system by which all essential contrasting methods in microscopy can be realized. The illumination device according to the invention comprises a plurality of individual light sources which can be regulated with respect to brightness, wherein these individual light sources are formed as unit cells and form a luminous surface by a periodic arrangement. In an advantageous arrangement, imaging optics are associated with each individual light source in order to magnify the image of the source surface of the individual light source so that the images of the source surfaces of adjacent individual light sources touch. Illumination variants for all of the essential contrasting methods in microscopy can be generated by way of the proposed solution. The proposed LED illumination is electronically switchable, can be regulated with respect to brightness, supplies all colors, is long-lasting and economical. LEDs have a long life and are very robust and insensitive to vibrations. The spatial light distribution and the color temperature are adjustable.

Illumination device, in particular for microscopes

A calibration device for managing a variety of performance tests and/or calibration tasks in a laser scanning microscope. The calibration device, which has focusing optics and a test structure arranged in the focal plane of the focusing optics, with structural elements detectable in reflected and/or transmitted light aligned to each other in a common mounting, can be switched into the microscope beam path in a laser scanning microscope, so that the pupil of the focusing optics coincides with the objective pupil of the laser scanning microscope or lies in a plane conjugated to it.

Calibration device and laser scanning microscope with such a calibration device

An optical system for arranging between a light source and a field diaphragm in an illumination beam path of a microscope comprises n imaging optical elements with focal lengths fand Abbe numbers &#x3bd;(i=1, . . . , n). The following relationship is met for the optical system: where his one half of the bundle diameter of a bundle of light rays proceeding from a point of the light source at the entrance to the imaging optical element i.

Optical system

A condenser arrangement for brightfield illumination and/or darkfield illumination for optical microscopes comprises in a housing basic optics having at least one lens, at least one front optics which can be inserted into the illumination beam path in front of the basic optics, and means for inserting the front optics into the illumination beam path of the microscope. A first swiveling arm and a second swiveling arm are swivelably arranged at the housing of the condenser. The first swiveling arm carries first front optics with a high aperture for brightfield illumination and the second swiveling arm carries second front optics for darkfield illumination. The two swiveling arms are arranged at a defined distance from the shared basic optics of the condenser in direction of the optical axis of the illumination beam path. An aperture iris diaphragm is provided on the object side in front of the basic optics and is opened when the cardioid optics are inserted. Further, a darkfield slide with an annular mirror element is provided on the object side at the housing. Operator's controls serve to swivel the two swiveling arms for moving the darkfield slide and for adjusting the aperture iris diaphragm.

Condenser arrangement for brightfield illumination and/or darkfield illumination for optical microscopes

The invention is directed to a device for coupling light into the beam path of a microscope. Laser light is directed to the preparation in the field diaphragm plane through an in-coupling light-conducting fiber constructed as a slide. The invention is particularly suitable for the TIRF method.

Device for coupling light into a microscope

Growing community of inventors

Sulzbach-Laufen, Germany

Michael Brehm