Average Co-Inventor Count = 2.86
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Suss Microtec Lithography Gmbh (2 from 60 patents)
2 patents:
1. 11776827 - Adapter, connection device and supply system
2. 10295063 - Wafer treating device and sealing ring for a wafer treating device