Applied Materials Israel Limited

Michael Ben-Yishay

Ophir Gvirtzer

On Haran

Ishai Schwarzband

Boris Goldberg

Amir Moshe Sagiv

Shmuel Mangan

Chaim Braude

A system, method and computer program product for defect detection, the method includes: (i) retrieving a second pixel of a second image that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods; (ii) searching a third pixel of the second image such that a neighborhood of the second pixel is similar to a neighborhood of the third pixel; (iii) retrieving a fourth pixel of the first image that corresponds to the third pixel; and (iv) comparing between the tested pixel and the fourth pixel.

Method and system for defect detection

A system, method and computer readable medium for reticle evaluation, the method includes: (i) obtaining, during an imaging process, multiple images of the reticle under different polarization and optionally interferometric conditions; and (ii) generating an output aerial image in response to (i) the multiple images and (ii) differences between the imaging process and an exposure process; wherein during the exposure process an image of the reticle is projected onto a wafer.

Method and system for aerial imaging of a reticle

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Natanya, Israel

Michael Ben-Yishay