Dr. Johannes Heidenhain Gmbh

Johannes Heidenhain Gmbh

Michael Allgauer

Andreas Franz

Walter Huber

Peter Speckbacher

Erwin Spanner

Jan Braasch

Georg Flatscher

Erich Bayer

Christian Callimici

An optical position measuring device, in particular for a drive for precise positioning, is recited, which comprises two drive units which are movable in respect to each other, wherein one of the two drive units has a graduation as an integral component. The latter can be scanned by a scanning unit connected with the other drive unit for generating position-dependent output signals. The graduation is directly or indirectly disposed on a level surface of the drive unit, from which a distance between the two drive units is created in such a way that by the cooperation of the two drive units the generation of a defined relative movement between the two drive units is possible.

Optical position measuring device

The phase grating of the present invention includes a substrate with a reflective, continuous layer disposed thereon on which a structured spacer layer 3 of dielectric material is applied. To form a phase grating that can be used as a scale in photoelectric position measuring instruments, a further thin reflective surface layer is located solely on the reflective, continuous surfaces, parallel to the layer, of the structured spacer layer.

Phase grating and method of producing phase grating

An interferential apparatus and method for measuring displacement in which phase displaced signals may be generated by the proper selection of a light source and the division periods of a plurality of gratings.

Interferential linear and angular displacement apparatus having scanning

A measurement device having a correction grating associated with a gauge and deflects two diffracted partial beams overlappingly, at a very small angle (.alpha.), onto a single coupling grating. From there, two waveguides located closely beside one another are used to introduce the beams into a coupler and the beams are superimposed and evaluated in a known manner. Thus, a position measuring device can be drastically reduced in its structural size with the aid of an integrated optical component.

Device for coupling and/or decoupling beams of light, with an integrated

A position measuring apparatus for measuring the position of an object having an integrated optical circuit on a substrate comprising a first grating for diffracting a light beam into a reference bundle and a measuring bundle. The first grating couples the reference bundle to an input of a coupler and decouples the measuring bundle from the substrate. The measuring bundle is directed to a reflecting element on the object wherein the measuring bundle is reflected from the object. The coupler has means for inputting signals and for outputting signals wherein the input signals are brought into interference. A second grating couples the reflected measuring bundle to another input of the coupler. Detection means detect the outputs of the coupler and generate phase displaced signals representative of the outputs.

Integrated optical position measuring device and method with reference

A photoelectric measuring device for measuring the relative position between two objects utilizing interfering lightwave patterns is provided. Two diffraction gratings having an equal grid constants are provided to perpendicularly impinge beam bundles into circular coupling-in gratings of the integrated optical circuit. In addition, an integrated light source may be coupled-out of the integrated optical circuit.

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Stein, Germany

Michael Allgauer