Entegris, Inc.

Michael A Stein

Michael Stoick

James Donoho

Eric Soderstrom

Steven A Fischer

Todd J Edlund

Jeffrey C Kubesh

John A Leys

A method for sealingly coupling a first component and a second component. The method includes forming a polymer male portion attached to the first component. The male portion has a first axis and a first bore extending therethrough. The male portion has a first stop surface, a second stop surface and an annular sealing portion intermediate the first stop surface and the second stop surface. The method also includes forming a polymer female portion attached to the second component. The female portion has a second axis and a second bore extending therethrough. The female portion has a third stop surface, a fourth stop surface and an annular ring intermediate the third stop surface and the fourth stop surface. The male portion is urged towards the female portion so that at least one of the first stop surface is adjacent the third stop surface or the second stop surface is adjacent the fourth stop surface. The annular ring is subjected to a compressive force in an oblique direction with respect to at least one of the first axis and the second axis by contact with the annular sealing portion.

Component to component sealing method

A coupling ideally suited for sealing between components such as a fluoropolymer valve body ( ) and a fluoropolymer manifold ( ) or for coupling tubing end portions, utilizes structure on said components for defining the sealing surfaces. In a preferred embodiment, the coupling comprises a male protruding portion ( ), a recessed female receiving portion ( ), and a clamping means. The clamping means ( ) has an inner threaded surface for engaging a correspondingly threaded portion of the male protruding portion. The male protruding portion is shaped, generally, as a converging rounded conical frustum ( ) having an exterior surface, a primary sealing surface, a first stop surface ( ), a second cooperating stop surface, and a fluid flow duct. The fluid flow duct is preferably concentrically positioned. The recessed portion has a circular perimeter, an inwardly projecting annular ring ( ), a first cooperating stop surface, a second stop ( ) surface, and a fluid flow duct. The male protruding portion forms a seal by confronting the primary sealing surface and the annular sealing ring.

A valve made principally of plastic has a creep compensating features providing consistent engagement between valve members and their respective valve seats, minimizing creep, and compensating for any creep that does occur. The features compensate for compression of internal valve components as well as extension of the valve body. In a manually operated three way valve embodiment of the invention, a trapped spring mechanism inserted between an actuator portion and the upper valve member provides the closure force for the upper valve member on the upper valve seat. The first valve member and second valve member connect through a extensible portion. Valves according to the invention are particularly suitable for quarter-turn three-way manual diaphragm valves and for applications in the semiconductor industry.

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Eden Prairie, MN, United States of America

Michael A Stein