Corning Incorporated

Michael A Mueller

Kenneth Edward Hrdina

Susan Lee Schiefelbein

Carlos Alberto Duran

Michael Thomas Murtagh

Barbara L Stainbrook

In one embodiment the present disclosure is directed to a silica-titania glass with an internal transmission of &#x3e;90%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the internal transmission is &#x3e;93%/cm at wavelengths from 340 nm to 840 nm. In a further embodiment the internal transmission is &#x3e;95%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the disclosure is directed to a silica-titania glass with an overall transmission through an optic made of the glass is &#x3e;84% at wavelengths from 340 nm to 840 nm. In another embodiment overall transmission through an optic made of the glass is &#x3e;86% at wavelengths from 340 nm to 840 nm. In a further embodiment the overall transmission through an optic made of the glass is &#x3e;88% at wavelengths from 330 nm to 840 nm. In a further embodiment the silica-titania glass has a Ticoncentration level [Ti] less than 3 ppm by weight.

Low expansivity, high transmission titania doped silica glass

A method of making a fused silica article that is loaded with hydrogen. A fused silica glass near net shape part is provided and is loaded with a molecular hydrogen in a range from about 0.1&#xd7;10molecules/cmup to about 1&#xd7;10molecules/cm. The thinner shape of the near net shape part enables the shape to be loaded more quickly than previous methods. A fused silica article loaded with hydrogen using the method is also described.

Hydrogen loading of near net shape optics

A method of making a fused silica article having a combined concentration of protium and deuterium in a range from about 1&#xd7;10molecules/cmup to about 6&#xd7;10molecules/cm. In some embodiments, deuterium is present in an amount greater than its natural isotopic abundance. The method includes the steps of providing a fused silica boule, diffusing at least one of protium and deuterium into the boule, and annealing the boule to form the fused silica article. A method of diffusing hydrogen into fused silica and a fused silica article loaded with hydrogen formed by the method are also described.

Fused silica article loaded with deuterium and method of making

A low thermal expansion glass includes a base glass material having a front surface, a back surface, and a thickness and a glass coating material applied on at least the front surface of the base glass material. The base glass material consists essentially 10 wt % to 20 wt % titania and 80 wt % to 90 wt % silica. The glass coating material also consists essentially of titania and silica, but the total amount of titania in the glass coating material is lower than the total amount of titania in the base glass material. A silica-titania glass element suitable for extreme ultraviolet lithography applications consists of 12 wt % to 20 wt % titania and 80 wt % to 88 wt % silica and has a coefficient of thermal expansion of essentially 0 &#x394;L/L in a temperature range of &#x2212;20&#xb0; C. to +100&#xb0; C.

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Roth, Germany

Michael A Mueller