Qualitau, Inc.

Michael A Casolo

Peter P Cuevas

Shahriar Mostarshed

James Borthwick

Edward McCloud

Michael L Anderson

Tal Raichman

A dual channel source measurement unit for reliability testing of electrical devices provides a voltage stress stimulus to a device under test and monitors degradation to the device under test caused by the stress simulator. The dual channel source measurement unit decouples the stress and monitor portions of the unit so that the requirements of each can be optimized. Deglitching and current clamp switches can be incorporated in the dual channel source measurement unit to prevent glitches in the switching circuitry and to limit or clamp current flow to or from the monitor and stress sources.

Dual channel source measurement unit for semiconductor device testing

A probe card is vertically mounted generally perpendicular to a wafer undergoing life tests in a heated environment to limit exposure of the probe card to heat from the wafer chuck. The probe card and probe head assembly are mounted on a support rail which has one or more channels for the flow of cool air to a probe head assembly and the probe card, while it shields the flex cable from the hot chuck. The cool air flow disrupts convective hot air flow upwards from the heated chuck to the probe card and probe head and facilitates cooling of the probe card and probe head.

Vertical probe card and air cooled probe head system

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Oakland, CA, United States of America

Michael A Casolo