Varian Semiconductor Equipment Associates, Inc.

Michael A Beck

Charles T Carlson

William Tyler Weaver

James D Strassner

Lawrence Randolph Gravell

Aaron Webb

Scott A Smith

Michael C Simmons

A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.

System and method for 2D workpiece alignment

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Pflugerville, TX, United States of America

Michael A Beck