Industrial Technology Research Institute

Miao-Ju Chueh

Tung-Sheng Shih

I-Cherng Chen

Yih-Shiaw Huang

Pi-Guey Su

A gas sensor is disclosed, which includes two separate metal electrodes on a surface of a substrate and a semiconductor thin film deposited on the surface of the substrate and connecting the two metal electrodes. The semiconductor thin film contains zinc oxide or a mixed oxide of zinc and indium, and the zinc oxide or the mixed oxide of zinc and indium are in the form of nanowires which constitute a gas-sensing surface of the semiconductor thin film. The nanowires have a diameter of 50-900 nm. The present invention also discloses a method for detecting the presence of a NOx gas.

Gas sensor with nanowires of zinc oxide or indium/zinc mixed oxides and method of detecting NOx gas

A pulse-type gas concentration measurement system and a method of pulse-type gas concentration measurement in a specific environment. When the sensor is located at a specific position, a variable pulse-modulated voltage is sent to the sensor, so that the sensor outputs a first signal to the processing device. The processing device compares the first signal to the chemical matter characteristics signals to determine the composition and concentration of respective constituents in the gas, and determines a detection voltage according to the first signal. Then, a square-wave pulse with the detection voltage is sent intermittently to the sensor, so that the sensor outputs a second signal to the processing device. The processing device compares the second signal to the chemical matter characteristics signal to determine the concentration variation of each respective constituent of the gas.

Growing community of inventors

Hsinchu, Taiwan

Miao-Ju Chueh