Fujitsu Corporation

Fujitsu Media Devices Limited

Mi Xiaoyu

Osamu Tsuboi

Satoshi Ueda

Hiromitsu Soneda

Norinao Kouma

Ippei Sawaki

Hisao Okuda

Yoshitaka Nakamura

A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.

Method for driving micro-oscillating element having comb-teeth electrodes

A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.

Micro-oscillation element incorporating springs

A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.

Method for manufacturing micro-structural unit

Micro-oscillation element having two rotational axes that are non-orthogonal to each other

Growing community of inventors

Kawasaki, Japan

Mi Xiaoyu