University of Michigan

Meysam Moallem

Kamal Sarabandi

Mehrnoosh Vahidpour

Armin Jam

Jack East

A broadband fully micromachined transition from rectangular waveguide to cavity-backed coplanar waveguide line for submillimeter-wave and terahertz application is presented. The cavity-backed coplanar waveguide line is a planar transmission line that is designed and optimized for minimum loss while providing 50 Ohm characteristic impedance. This line is shown to provide less than 0.12 dB/mm loss over the entire J-band. The transition from cavity-backed coplanar waveguide to a reduced-height waveguide is realized in three steps to achieve a broadband response with a topology amenable to silicon micromachining. A novel waveguide probe measurement setup is also introduced and utilized to evaluate the performance of the transitions.

Non-contact on-wafer S-parameter measurements of devices at millimeter-wave to terahertz frequencies

A frequency scanning traveling wave antenna array is presented for Y-band application. This antenna is a fast wave leaky structure based on rectangular waveguides in which slots cut on the broad wall of the waveguide serve as radiating elements. A series of aperture-coupled patch arrays are fed by these slots. This antenna offers 2&#xb0; and 30&#xb0; beam widths in azimuth and elevation direction, respectively, and is capable of &#xb1;25&#xb0; beam scanning with frequency around the broadside direction. The waveguide can be fed through a membrane-supported cavity-backed CPW which is the output of a frequency multiplier providing 230&#x2dc;245 GHz FMCW signal. This structure can be planar and compatible with micromachining application and can be fabricated using DRIE of silicon.

Growing community of inventors

Ann Arbor, MI, United States of America

Meysam Moallem