Aixtron Se

Merim Mukinovic

Stephen E Savas

Carl Galewski

Described herein is an exhaust manifold () comprising suction opening (), a gas extraction chamber (), an intermediate space (), a gas collection chamber () and a suction line (). A flow-impeding structure may be present within the intermediate space (). The flow impeding structure may exert a flow resistance on the gas flow which is greater in a central zone (Z) than in edge zones (R) of the intermediate space (), causing gas to flow into the suction opening () at a substantially uniform gas flow speed across the cross section of the suction opening ().

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Würselen, Germany

Merim Mukinovic