Peking University

Mengdi Han

Haixia Zhang

Xiaoliang Cheng

Haotian Chen

Bo Meng

Mayue Shi

Xiaosheng Zhang

Fuyun Zhu

Jinxin Zhang

Zongming Su

A single-surface position sensor and a positioning method thereof are disclosed. The single-surface position sensor comprises a substrate layer () and induction electrodes (); the induction electrodes () are located on the substrate layer (); the sensor further comprises a friction layer (); the friction layer () is located on the substrate layer (); the friction layer () is located among the induction electrodes (); the individual induction electrodes () are grounded through the same load resistors, so that an object under test contacts with and is separated from the friction layer () at least one time and different voltage outputs are generated across the various load resistors; a position of the object under test is determined by analyzing a ratio of the voltages of all the electrodes (); the single-surface position sensor is an active sensor and reduce energy consumption as compared with traditional sensors; the single-surface position sensor can be manufactured into a flexible transparent thin film and can be widely applied to portable electronic devices and wearable devices; and the single-surface position sensor is simple in process and low in cost.

Single-surface position sensor and positioning method thereof

The present disclosure discloses an integrated micro/nanogenerator and a method of fabricating the same The integrated micro/nanogenerator has a structure comprising a conducting layer, a PET layer, a PDMS layer, a micro-nano hierarchical PDMS array and a metal film layer, the conducting layer being manufactured on a surface of the PET layer, the PET layer being made of polyethylene terephthalate; the PDMS layer being made of polydimethylsiloxane, and the micro-nano hierarchical PDMS array being manufactured on a surface of the PDMS layer. The method comprises steps of: 1) fabricating a micro-scale structure on a substrate through a combination of lithography and chemical etching or physical etching; 2) fabricating a nano-scale structure with high density and high depth-to-width ratio directly on a surface of the micro-scale structure through a mask-free optimized deep reactive ion etching process; 3) using a PDMS casting film transfer process by adjusting and controlling process parameters, by means of using the mold of mirco-nano hierarchical array structure as a template; 4) fabricating a conducting layer on a surface of the PET layer by using an evaporation or sputtering or chemical vapor deposition process; 5) bonding the PDMS layer and the PET layer through high temperature bonding or normal temperature physical pressing; and 6) assembling in sequence and packaging the bonded structure obtained in step 5), the metal film layer, and another bonded structure obtained in step 5).

Integrated micro/nanogenerator and method of fabricating the same

Growing community of inventors

Beijing, China

Mengdi Han