Tokyo Electron Limited

Meng Yiau Yu

Yoshiaki Sasaki

Hirofumi Yamaguchi

Hirohito Kikushima

Masato Kubodera

In a method for positioning a transfer unit including, support pins for supporting object, and a pick having at a leading end thereof a detection unit for detecting presence or absence of the object, a height reference position of the pick is determined by detecting an upper edge of one of the support pins by the detection unit. A forward moving angle of the pick is corrected by obtaining a deviation angle between a radial direction of the mounting table passing through the corresponding support pin and a forward moving direction of the pick. A forward movement starting point of the pick is corrected by obtaining a horizontal deviation distance between the radial direction of the mounting table and the forward moving direction of the pick. A forward moving reference amount of the pick is obtained from coordinates of the corresponding support pin.

Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit

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Nirasaki, Japan

Meng Yiau Yu