Huazhong University of Science and Technology

Meng Xu

Xiangshui Miao

Xiaomin Cheng

Ming Xu

Jinlong Feng

A superlattice phase-change thin film with a low density change, a phase-change memory and a preparation method. The superlattice phase-change thin film includes first phase-change layers () and second phase-change layers () that are alternately stacked to form a periodic structure; during crystallization, the first phase-change layer () has a conventional positive density change, and the second phase-change layer () has an abnormal negative density change, therefore, the abnormal density reduction and volume increase of the second phase-change layer () during crystallization can be used to offset the volume reduction of the first phase-change layer () during crystallization.

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Hubei, China

Meng Xu