Guangdong University of Technology

Meng Wang

Xin Chen

Jian Gao

Zhijun Yang

Youdun Bai

Haidong Yang

Hui Tang

The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

Stiffness-frequency adjustable XY micromotion stage based on stress stiffening

The present disclosure relates to a macro-micro composite grating ruler measuring system based on conversion and amplification in vertical and horizontal directions. The macro-micro composite grating ruler includes a grating ruler, a macro-micro reading system moving with respect to the grating ruler, and a counting and image processing module. The macro-micro reading system faces grating strip datum and is parallel to the grating ruler. The system further includes a measuring reference line. The measuring reference line obtained by the image sensor together with grating strips forms an image overlap in the counting and image processing module. The measuring reference line and the grating strip jointly include an angle &#x3b8;. With the foregoing configuration, the present invention is compatible with the existing incremental grating rulers and absolute grating rulers, so is highly applicable.

Macro-micro composite grating ruler measuring system and measuring method using same comprising a macro-scale reading module, a micro-scale reading module and a measuring reference line

Growing community of inventors

Guangzhou, China

Meng Wang