Taiwan Semiconductor Manufacturing Comp. Ltd.

Meng-Hsun Wan

Dun-Nian Yaung

Szu-Ying Chen

Jen-Cheng Liu

Pao-Tung Chen

Yi-Shin Chu

Tzu-Jui Wang

Cheng-Tao Lin

A device comprises a first chip comprising a first connection pad embedded in a first dielectric layer and a first bonding pad embedded in the first dielectric layer, wherein the first bonding pad comprises a first portion and a second portion, the second portion being in contact with the first connection pad and a second chip comprising a second bonding pad embedded in a second dielectric layer of the second chip, wherein the first chip and the second chip are face-to-face bonded together through the first bonding pad the second bonding pad.

Stacked semiconductor structure and method

A backside illuminated image sensor having a photodiode and a first transistor in a sensor region and located in a first substrate, with the first transistor electrically coupled to the photodiode. The image sensor has logic circuits formed in a second substrate. The second substrate is stacked on the first substrate and the logic circuits are coupled to the first transistor through bonding pads, the bonding pads disposed outside of the sensor region.

Method and apparatus for image sensor packaging

A device includes an image sensor chip having formed therein an elevated photodiode, and a device chip underlying and bonded to the image sensor chip. The device chip has a read out circuit electrically connected to the elevated photodiode.

Elevated photodiode with a stacked scheme

A method comprises depositing a first dielectric layer over a first chip comprising a plurality of first active circuits and a first connection pad, patterning the first dielectric layer to form a first opening, filling the first opening to form a connector in contact with the first connection pad, depositing a second dielectric layer over the first dielectric layer, patterning the second dielectric layer to form a second opening over the connector, filling the second opening to form a first bonding pad in contact with the connector, stacking a second chip on the first chip, wherein the second chip comprises a plurality of second active circuits and a second bonding pad and bonding the first chip and a second chip together to form a stacked semiconductor device through applying a hybrid bonding process to the first bonding pad and the second bonding pad.

A device includes an image sensor chip having an image sensor therein. A read-out chip is underlying and bonded to the image sensor chip, wherein the read-out chip includes a logic device selected from the group consisting essentially of a reset transistor, a source follower, a row selector, and combinations thereof therein. The logic device and the image sensor are electrically coupled to each other, and are parts of a same pixel unit. A peripheral circuit chip is underlying and bonded to the read-out chip, wherein the peripheral circuit chip includes a logic circuit.

CMOS image sensor chips with stacked scheme and methods for forming the same

A device comprises a first chip comprising a plurality of first interconnect structures over a first substrate, a plurality of first connection pads over the plurality of first interconnect structures and a plurality of first bonding pads, wherein a first bonding pad is formed over a corresponding first connection pad, and a second chip comprising a plurality of second interconnect structures over a second substrate and a plurality of second bonding pads over the plurality of second interconnect structures, wherein the first chip and the second chip are face-to-face bonded together, and wherein a first bonding pad is in direct contact with a corresponding second bonding pad.

Stacked semicondcutor structure and method

A device includes a first chip including an image sensor therein, and a second chip bonded to the first chip. The second chip includes a logic device selected from the group consisting essentially of a reset transistor, a selector, a row selector, and combinations thereof therein. The logic device and the image sensor are electrically coupled to each other, and are parts of a same pixel unit.

Forming pixel units of image sensors through bonding two chips

A device includes a plurality of isolation spacers, and a plurality of bottom electrodes, wherein adjacent ones of the plurality of bottom electrodes are insulated from each other by respective ones of the plurality of isolation spacers. A plurality of photoelectrical conversion regions overlaps the plurality of bottom electrodes, wherein adjacent ones of the plurality of photoelectrical conversion regions are insulated from each other by respective ones of the plurality of isolation spacers. A top electrode overlies the plurality of photoelectrical conversion regions and the plurality of isolation spacers.

Growing community of inventors

Taipei, Taiwan

Meng-Hsun Wan